Book contents
- Frontmatter
- Contents
- Acknowledgements
- 1 Introduction
- 2 Plasma dynamics and equilibrium
- 3 Bounded plasma
- 4 Radio-frequency sheaths
- 5 Single-frequency capacitively coupled plasmas
- 6 Multi-frequency capacitively coupled plasmas
- 7 Inductively coupled plasmas
- 8 Helicon plasmas
- 9 Real plasmas
- 10 Electrical measurements
- Appendix: Solutions to exercises
- References
- Index
References
Published online by Cambridge University Press: 04 April 2011
- Frontmatter
- Contents
- Acknowledgements
- 1 Introduction
- 2 Plasma dynamics and equilibrium
- 3 Bounded plasma
- 4 Radio-frequency sheaths
- 5 Single-frequency capacitively coupled plasmas
- 6 Multi-frequency capacitively coupled plasmas
- 7 Inductively coupled plasmas
- 8 Helicon plasmas
- 9 Real plasmas
- 10 Electrical measurements
- Appendix: Solutions to exercises
- References
- Index
Summary
- Type
- Chapter
- Information
- Physics of Radio-Frequency Plasmas , pp. 375 - 382Publisher: Cambridge University PressPrint publication year: 2011