Book contents
- Frontmatter
- Contents
- List of contributors
- Preface
- 1 Introduction to the focused ion beam system
- 2 Interaction of ions with matter
- 3 Gas assisted ion beam etching and deposition
- 4 Imaging using electrons and ion beams
- 5 Characterization methods using FIB/SEM DualBeam instrumentation
- 6 High-density FIB-SEM 3D nanotomography: with applications of real-time imaging during FIB milling
- 7 Fabrication of nanoscale structures using ion beams
- 8 Preparation for physico-chemical analysis
- 9 In-situ sample manipulation and imaging
- 10 Micro-machining and mask repair
- 11 Three-dimensional visualization of nanostructured materials using focused ion beam tomography
- 12 Ion beam implantation of surface layers
- 13 Applications for biological materials
- 14 Focused ion beam systems as a multifunctional tool for nanotechnology
- Index
Frontmatter
Published online by Cambridge University Press: 12 January 2010
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Book contents
- Frontmatter
- Contents
- List of contributors
- Preface
- 1 Introduction to the focused ion beam system
- 2 Interaction of ions with matter
- 3 Gas assisted ion beam etching and deposition
- 4 Imaging using electrons and ion beams
- 5 Characterization methods using FIB/SEM DualBeam instrumentation
- 6 High-density FIB-SEM 3D nanotomography: with applications of real-time imaging during FIB milling
- 7 Fabrication of nanoscale structures using ion beams
- 8 Preparation for physico-chemical analysis
- 9 In-situ sample manipulation and imaging
- 10 Micro-machining and mask repair
- 11 Three-dimensional visualization of nanostructured materials using focused ion beam tomography
- 12 Ion beam implantation of surface layers
- 13 Applications for biological materials
- 14 Focused ion beam systems as a multifunctional tool for nanotechnology
- Index
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- Focused Ion Beam SystemsBasics and Applications, pp. i - ivPublisher: Cambridge University PressPrint publication year: 2007