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11 - Selected Topics on Mechanical and Thermal Transduction

from Part III - Selected Topics on Physics of Transduction

Published online by Cambridge University Press:  23 December 2021

Marco Tartagni
Marco Tartagni
Affiliation:
University of Bologna
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Summary

This chapter is focused on the concepts of mechanical and thermal transduction related to the change of conductance and polarization in materials. Therefore, after an introduction on basic concepts, the transduction processes of piezoresistivity, piezoelectricity, and temperature effects on resistance are discussed. Finally, examples of applications of resistance sensors are given, focusing on some techniques to reduce errors due to influence variables.

Keywords

piezoresistivitypiezoelectricitystrain gaugesresistance temperature detectorsplatinum resistance thermometer
Type
Chapter
Information
Electronic Sensor Design Principles , pp. 544 - 594
Publisher: Cambridge University Press
Print publication year: 2022

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References

Further Reading

Caspari, E., and Merz, W. J., The electromechanical behavior of BaTiO3 single-domain crystals, Phys. Rev., vol. 80, no. 6, pp. 1082–1089, Dec. 1950.Google Scholar
Feynman, R. P., Robert, B. L., Sands, M., and Gottlieb, M. A., The Feynman Lectures on Physics. Reading, MA: Pearson/Addison-Wesley, 1963.Google Scholar
Institute of Electrical and Electronics Engineers, 176–1987 – ANSI/IEEE Standard on Piezoelectricity, 1988.Google Scholar
Kaajakari, V., Practical MEMs. Small Gear Publishing, 2009.Google Scholar
Kanda, Y., A graphical representation of the piezoresistance coefficients in silicon,” IEEE Trans. Electron Devices, vol. 29, no. 1, pp. 64–70, 1982.CrossRefGoogle Scholar
Kao, K. C., Dielectric Phenomena in Solids. Philadelphia: Elsevier Science, 2004.Google Scholar
Liu, C., Foundations of MEMs. Upper Saddle River, NJ: Pearson, 2012.Google Scholar
Kerr, D. R., and Milnes, A. G., Piezoresistance of diffused layers in cubic semiconductors, J. Appl. Phys., vol. 34, no. 4, pp. 727–731, 1963.Google Scholar
Madou, M., Fundamentals of Microfabrication: The Science of Miniaturization, 2nd ed. Boca Raton, FL: CRC Press, 2002.Google Scholar
Nemeth, M. P., An in-depth tutorial on constitutive equations for elastic anisotropic materials,” NASA Report NASA/TM–2011–217314, 2011.Google Scholar
Senturia, S. D., Microsystem Design. New York: Springer Science+Business Media, 2000.Google Scholar
Smith, C. S., Piezoresistance effect in germanium and silicon, Phys. Rev., vol. 94, no. 1, pp. 42–49, 1954.CrossRefGoogle Scholar
Vishay Precision Group, Strain gage thermal output and gage factor variation with temperature,” 2012.Google Scholar
Warren Young, A. S., and Budynas, R., Roark’s Formulas for Stress and Strain, 8th ed. New York: McGraw-Hill, 2011.Google Scholar
www.acromag.com, Criteria for temperature sensor selection of T/C and RTD Sensor types, 2011.Google Scholar

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