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4 - Has ASAT Been Achieved?

from Core Section

Published online by Cambridge University Press:  03 March 2022

Thomas F. Kelly ,
Brian P. Gorman  and
Simon P. Ringer
Thomas F. Kelly
Affiliation:
Steam Instruments, Inc.
Brian P. Gorman
Affiliation:
Colorado School of Mines
Simon P. Ringer
Affiliation:
University of Sydney
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Summary

Using our strict definition of Atomic Scale Analytical Tomography (ASAT), we explore the current landscape of materials characterization tools and discuss how electron microscopy, field ion microscopy, and atom probe tomography are each approaching ASAT. State-of-the-art electron microscopy can achieve sub-angstrom spatial resolution imaging in 2-D and small volumes in 3-D but lacks single-atom chemical sensitivity, especially in 3-D. Field Ion Microscopy can achieve 3-D imaging on small volumes but not for all materials. Atom probe tomography can achieve single-atom elemental quantification in 3-D but lacks the spatial resolution necessary for ASAT. The chapter concludes with a comparison of the different techniques and discusses how different techniques may be complementary.

Keywords

STEM EELS tomographySTEM EDS tomographyphase retrieval microscopy4D STEMcompressed-sensing electron tomographyatomic electron tomography
Type
Chapter
Information
Atomic-Scale Analytical Tomography
Concepts and Implications
 , pp. 55 - 76
Publisher: Cambridge University Press
Print publication year: 2022

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