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Three-Dimensional Electron Energy Deposition Modeling of Cathodoluminescence Emission near Threading Dislocations in GaN and Electron-Beam Lithography Exposure Parameters for a PMMA Resist
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- Journal:
- Microscopy and Microanalysis / Volume 18 / Issue 6 / December 2012
- Published online by Cambridge University Press:
- 12 November 2012, pp. 1220-1228
- Print publication:
- December 2012
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- Article
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