The effect of different combinations of a new tri-templating agent TEAOH/DEA/TEA, namely tetraethyl ammonium hydroxide (TEAOH)/diethylamine (DEA)/triethylamine (TEA), on the catalytic performance of SAPO-34 was investigated in MTO conversion. It was found that SAPO-34 and SAPO-5 are competing phases at TEA concentrations higher than 40 %. Pure SAPO-34 with high crystallinity, large BET surface area and small crystal size (0.8~1.4μm) was obtained at a low TEA concentrations. The combination of TEAOH/DEA/TEA strongly governed the acidity of crystals. TEAOH:DEA:TEA=0.67:0.67:0.67 gave an economical catalyst active in MTO reaction with 100 % methanol conversion, 89.39 % ethylene and propylene selectivity, a longest lifetime and a high coke capability of 24.2 wt %.