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small-scale focal spot

Laser and Particle Beams (1)

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High-precision small-scale laser focal spot measurements
Z.W. Lu, X.Y. Liu, X. Wang, D.X. Ba, Z.H. Jiang, P.Y. Du, C.Y. Zhu
Journal:

Laser and Particle Beams / Volume 31 / Issue 1 / March 2013

Published online by Cambridge University Press:

06 February 2013, pp. 177-183
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In this paper, a method of two-dimensional fine-scanning with charge coupled device has been conducted to precisely measure spatial position and intensity distribution of small-scale focal spot (diameter in microns). The measurement accuracy of the small-scale focal spot position is better than 1 µm when the fluctuations of the light energy and background noise are relatively small. The theoretical analysis is consistent with the experimental results.