The reflection shift δ2Θ caused by a radial shift δr of the sample away from its tangential position at the focusing circle is examined for grazing incidence diffraction and grazing excidence diffraction. Experimental results for residual strain/stress evaluation on thin films using a Bragg–Brentano diffractometer with a grazing incidence equipment are presented. Grazing excidence diffraction is less sensitive to δr than grazing incidence diffraction.

Using X-ray grazing incidence diffraction (GID) it is possible to perform a nondestructive analysis of the heterogeneous stress field for different volumes below the surface of the sample. The stress can be measured at very small depths, of the order of a few μm. The penetration depth of radiation is almost constant in a wide 2θ range for a given incidence angle α. It can be easily changed by an appropriate selection of α angle (or also by using a different type of radiation). There are, however, some factors which have to be corrected in this technique. The most important is the refraction of X-ray wave: it changes the wavelength and direction of the beam. Both effects modify a pick position. A corresponding correction was calculated and tested on ferrite powder and on 316L austenite stainless steel sample.

We describe a funnel cone for concentrating an ion beam on a target. The cone utilizes the reflection characteristic of ion beams on solid walls to focus the incident beam and increase beam intensity on target. The cone has been modeled with the TRIM code. A prototype has been tested and installed for use in the 350-keV K+ NDCX target chamber.