Time-of-flight spectra of C, Fe, and Si ions produced with the use of a KrF excimer laser have been analyzed. Ion currents were collected by Faraday cups and their responses were analyzed using a detector signal function. This function was derived from shifted Maxwell-Boltzmann velocity distribution, in order to uncover the contribution of partial currents of all the ionized species constituting the expanding plasma plume. The deconvolution method allowed to estimate parameters of the plasma, such as the ion temperature and the center-of-mass velocities of expanding ionized species. Furthermore, the linear charge-state dependence of the center-of-mass velocity has revealed the contribution of hydrodynamic and electrostatic forces to the expansion velocity of the plasma. The nearly isotropic distribution of the center-of-mass velocity indicates that the shape of the plasma plume is determined mainly by the angular distribution of the ionization degree of ions.
