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euv backlighting

Laser and Particle Beams (1)

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Characterization of a dual-gas multi-jet gas puff target for high-order harmonic generation using extreme ultraviolet shadowgraphy
P.W. Wachulak, L. Wegrzynski, A. Bartnik, T. Fok, R. Jarocki, J. Kostecki, M. Szczurek, H. Fiedorowicz
Journal:

Laser and Particle Beams / Volume 31 / Issue 2 / June 2013

Published online by Cambridge University Press:

03 May 2013, pp. 219-227
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Characterization measurements and modes of operation of a novel, dual-gas multi-jet target, developed for experiments on high-order harmonic generation, are presented. The target has been formed by pulsed injection of argon through a nozzle in a form of linearly oriented small orifices. The argon jets were separated with the helium jets formed by injection of helium through alternate orifices in the nozzle. The targets have been characterized by extreme ultraviolet backlighting at 13.5 nm wavelength. Density profiles for this type of targets have been obtained, to our knowledge, for the first time.