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Synthesis of carbon nanbotubes by plasma-enhanced CVD process: gas phase study of synthesis conditions

Published online by Cambridge University Press:  12 June 2008

M. Guláš ,
C. S. Cojocaru ,
C. T. Fleaca ,
S. Farhat ,
P. Veis  and
F. Le Normand
M. Guláš*
Affiliation:
Groupe Surfaces and Interfaces, IPCMS, UMR 7504 CNRS, 23 rue du Loess, 67034 Strasbourg Cedex, France Department of Experimental Physics, FMFI, Comenius University, Mlynská dolina, F2, 84248 Bratislava, Slovakia
C. S. Cojocaru
Affiliation:
Groupe Surfaces and Interfaces, IPCMS, UMR 7504 CNRS, 23 rue du Loess, 67034 Strasbourg Cedex, France
C. T. Fleaca
Affiliation:
Groupe Surfaces and Interfaces, IPCMS, UMR 7504 CNRS, 23 rue du Loess, 67034 Strasbourg Cedex, France
S. Farhat
Affiliation:
LIMHP, Université Paris-13, avenue J.B. Clément, 93430 Villetaneuse, France
P. Veis
Affiliation:
Department of Experimental Physics, FMFI, Comenius University, Mlynská dolina, F2, 84248 Bratislava, Slovakia
F. Le Normand
Affiliation:
Groupe Surfaces and Interfaces, IPCMS, UMR 7504 CNRS, 23 rue du Loess, 67034 Strasbourg Cedex, France
*
[email protected]
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Abstract

To support experimental investigations, a model based on ChemkinTM software was used to simulate gas phase and surface chemistry during plasma-enhanced catalytic CVD of carbon nanotubes. According to these calculations, gas phase composition, etching process and growth rates are calculated. The role of several carbon species, hydrocarbon molecules and ions in the growth mechanism of carbon nanotubes is presented in this study. Study of different conditions of gas phase activation sources and pressure is performed.

Keywords

Type
Research Article
Information
The European Physical Journal - Applied Physics , Volume 43 , Issue 3: Topical Issue ITFPC (Innovations on Thin Films Processing and Characterisation) , September 2008 , pp. 353 - 356
Copyright
© EDP Sciences, 2008

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