Hostname: page-component-745bb68f8f-f46jp Total loading time: 0 Render date: 2025-01-12T20:48:45.994Z Has data issue: false hasContentIssue false
  • English
  • Français

Swift heavy ion-induced silicon dioxide nanostructuration: experimental observation of velocity effect

Published online by Cambridge University Press:  05 November 2012

A.D. Touboul ,
A. Privat ,
R. Arinero ,
F. Wrobel ,
E. Lorfèvre  and
F. Saigné
A.D. Touboul*
Affiliation:
Université Montpellier 2, IES, UMR5214, F-34095 Montpellier Cedex 5, France
A. Privat
Affiliation:
Université Montpellier 2, IES, UMR5214, F-34095 Montpellier Cedex 5, France
R. Arinero
Affiliation:
Université Montpellier 2, IES, UMR5214, F-34095 Montpellier Cedex 5, France
F. Wrobel
Affiliation:
Université Montpellier 2, IES, UMR5214, F-34095 Montpellier Cedex 5, France
E. Lorfèvre
Affiliation:
CNES, 31410 Toulouse, France
F. Saigné
Affiliation:
Université Montpellier 2, IES, UMR5214, F-34095 Montpellier Cedex 5, France
*
ae-mail: [email protected]
Get access

Abstract

Thanks to atomic force microscope observation of swift heavy ion-induced structural modifications of SiO2-Si layer, we show that for a given linear energy transfer value the radial atomic modification along the ion track depends on the ion velocity regime.

Type
Research Article
Information
The European Physical Journal - Applied Physics , Volume 60 , Issue 1 , October 2012 , 10402
Copyright
© EDP Sciences, 2012

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

Audouard, A., Balanzat, E., Jousset, J.C., Lesueur, D., Thomé, L., J. Phys.: Condens. Matter 5, 995 (1993)
Dunlop, A., Lesueur, D., Radiat. Eff. Defects Solids 126, 123 (1993)CrossRef
Lesueur, D., Dunlop, A., Radiat. Eff. Defects Solids 126, 163 (1993)CrossRef
Furuno, S., Otsu, H., Hojou, K., Izui, K., Nucl. Instrum. Methods Phys. Res. B: Beam Interact. Mater. Atoms 107, 223 (1996)CrossRef
Klaumünzer, S., Nucl. Instrum. Methods Phys. Res. B: Beam Interact. Mater. Atoms 225, 136 (2004)CrossRef
Toulemonde, M., Dufour, C., Meftah, A., Paumier, E., Nucl. Instrum. Methods Phys. Res. B: Beam Interact. Mater. Atoms 166–167, 903 (2000)CrossRef
Katz, R., Kobetich, E.J., Phys. Rev. 170, 401 (1968)CrossRef
Silk, E.C.H., Barnes, R.S., Philos. Mag. 4, 970 (1959)CrossRef
Carvalho, A.M.J.F., Touboul, A.D., Marinoni, M., Carlotti, J.-F., Guasch, C., Rarnonda, M., Lebius, H., Saigne, F., Bonnet, J., Nucl. Instrum. Methods Phys. Res. B: Beam Interact. Mater. Atoms 266, 2981 (2008)CrossRef
Carvalho, A.M.J.F., Marinoni, M., Touboul, A.D., Guasch, C., Lebius, H., Ramonda, M., Bonnet, J., Saigne, F., Appl. Phys. Lett. 90, 7 (2007)
Carlotti, J.F., Touboul, A.D., Ramonda, M., Caussanel, M., Guasch, C., Bonnet, J., Gasiot, J., Appl. Phys. Lett. 88, 041906 (2006)CrossRef
Choi, B.K. et al., IEEE Trans. Nucl. Sci. 49, 3045 (2002)CrossRef
Marinoni, M., Touboul, A.D., Zander, D., Petit, C., Carvalho, A.M.J.F., Wrobel, F., Saigne, F., Weulersse, C., Miller, F., Carriere, T., Lorfevre, E., IEEE Trans. Nucl. Sci. 56, 2213 (2009)CrossRef
Schwank, J.R., Shaneyfelt, M.R., Fleetwood, D.M., Felix, J.A., Dodd, P.E., Paillet, P., Ferlet-Cavrois, V., IEEE Trans. Nucl. Sci. 55, 1833 (2008)CrossRef
Massengill, L.W. et al., IEEE Trans. Nucl. Sci. 48, 1904 (2001)CrossRef
Sexton, F.W. et al., IEEE Trans. Nucl. Sci. 45, 2509 (1998)CrossRef
Conley, J.F. Jr., Suehle, J.S., Johnston, A.H., Wang, B., Miyahara, T., Vogel, E.M., Bernstein, J.B., IEEE Trans. Nucl. Sci. 48, 1913 (2001)CrossRef
Bayerl, A., Lanza, M., Porti, M., Campabadal, F., Nafría, M., Aymerich, X., Benstetter, G., Microelectron. Eng. 88, 1334 (2011)CrossRef
Marinoni, M., Touboul, A.D., Zander, D., Petit, C., Wrobel, F., Carvalho, A.M.J.F., Arinero, R., Ramonda, M., Saigne, F., Weulersse, C., Buard, N., Carriere, T., Lorfevre, E., IEEE Trans. Nucl. Sci. 55, 2970 (2008)CrossRef
Akcöltekin, E., Akcöltekin, S., Osmani, O., Duvenbeck, A., Lebius, H., Schleberger, M., New J. Physics 10, 053007 (2008)CrossRef
Akcöltekin, E., Peters, T., Meyer, R., Duvenbeck, A., Klusmann, M., Monnet, I., Lebius, H., Schleberger, M., Nature Nanotechnol. 2, 290 (2007)CrossRef
Toulemonde, M., Dufour, C., Paumier, E., Phys. Rev. B 46, 14362 (1992)CrossRef
Meftah, A., Brisard, F., Costantini, J.M., Hage-Ali, M., Stoquert, J.P., Studer, F., Toulemonde, M., Phys. Rev. B 48, 920 (1993)CrossRef
Karlusic, M., Akcoeltekin, S., Osmani, O., Monnet, I., Lebius, H., Jaksic, M., Schleberger, M., arXiv:0911.1045, 2009
Barak, J., Akkerman, A., IEEE Trans. Nucl. Sci. 52, 2175 (2005)CrossRef
Ziegler, J.F., Ziegler, M.D., Biersack, J.P., Nucl. Instrum. Methods Phys. Res. B: Beam Interact. Mater. Atoms 268, 1818 (2010)CrossRef
Naceur, M., Touboul, A.D., Vaille, J.R., Lorfevre, E., Bezerra, F., Chaumont, G., Saigne, F., IEEE Trans. Nucl. Sci. 59, 786 (2012)CrossRef
Suehle, J.S., Vogel, E.M., Roitman, P., Conley, J.F. Jr., Johnston, A.H., Wang, B., Bernstein, J.B., Weintraub, C.E., Appl. Phys. Lett. 80, 1282 (2002)CrossRef
Avasthi, D.K., Mehta, G.K., Swift Heavy Ions for Materials Engineering and Nanostructuring (Springer Verlag, New York, USA, 2011)CrossRefGoogle Scholar
Aumayr, F., Facsko, S., El-Said, A.S., Trautmann, C., Schleberger, M., J. Phys.: Condens. Matter 23, 393001 (2011)
El-Said, A.S., Wilhelm, R.A., Heller, R., Facsko, S., Trautmann, C., Aumayr, F., Nucl. Instrum. Methods Phys. Res. B: Beam Interact. Mater. Atoms 269, 1234 (2011)CrossRef