Published online by Cambridge University Press: 15 May 1999
Thin amorphous CuInS2 films were deposited on the glass substrates by single source thermal evaporation technique. The effect of heat treatments in sulfur atmosphere, in air and under vacuum on the surface layers is discussed in terms of the surface structure of the films. The films were examined by grazing X-ray diffraction and reflectometry (GXRD and GXRR). From a comparison with the GXRD results, the densities of the surface layers are explained by the presence of secondary phases. We established a correlation between stoichiometry and conductivity depending on the annealing conditions.