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Study of structural and electrical properties of zinc oxide and Al-doped zinc oxide thin films deposited by DC sputtering

Published online by Cambridge University Press:  22 May 2013

Amira Barhoumi ,
Liu Yang ,
Nawfel Sakly ,
Habib Boughzala ,
Gérard Leroy ,
Joël Gest ,
Jean-Claude Carru  and
Samir Guermazi
Amira Barhoumi*
Affiliation:
Unit of Physics of Insulators Materials and Semi-insulators, Street Menzel chaker km 0.5, B.P. 1172, 3018 Sfax, Tunisia
Liu Yang
Affiliation:
Unit of Dynamics and Structure of Molecular Materials, B.P. 717, 62228 Calais, France
Nawfel Sakly
Affiliation:
Laboratory of Physics of Interfaces and Advanced Materials, avenue de l’Environnement, 5000 Monastir, Tunisia
Habib Boughzala
Affiliation:
Laboratory of Crystallochemistry, Campus Universitaire, 1060 Tunis, Tunisia
Gérard Leroy
Affiliation:
Unit of Dynamics and Structure of Molecular Materials, B.P. 717, 62228 Calais, France
Joël Gest
Affiliation:
Unit of Dynamics and Structure of Molecular Materials, B.P. 717, 62228 Calais, France
Jean-Claude Carru
Affiliation:
Unit of Dynamics and Structure of Molecular Materials, B.P. 717, 62228 Calais, France
Samir Guermazi
Affiliation:
Unit of Physics of Insulators Materials and Semi-insulators, Street Menzel chaker km 0.5, B.P. 1172, 3018 Sfax, Tunisia
*
a e-mail: [email protected]
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Abstract

Transparent conducting aluminum-doped and undoped ZnO thin films have been deposited by direct current (DC) sputtering technique from ZnO target onto glass substrate at room temperature and 400 °C. X-ray diffraction analysis shows that all films have a preferential growth along the c-axis of the hexagonal structure. The average grain size increases with the increasing deposition temperature and the doping of thin films. Analysis with AFM shows an improvement of the surface with the doping of thin films and deposition temperature. The root main square (RMS) surface roughness increases with deposition temperature. Al-doped ZnO (AZO) thin films have a lower electrical resistivity than that of ZnO thin films. 1/f noise measurement shows that ZnO thin film is more homogeneous than that of AZO.

Type
Research Article
Information
The European Physical Journal - Applied Physics , Volume 62 , Issue 2 , May 2013 , 20302
Copyright
© EDP Sciences, 2013

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