Published online by Cambridge University Press: 22 February 2011
The paper discusses the results of a study on the formation of indium oxide nanoclusters in silica samples implanted with high energy indium ions. Trace quantities of indium oxide were found on as-implanted samples. On annealing in vacuum/oxygen atmosphere significant increase in the quantity of indium oxide phase was observed. A mechanism is proposed for the formation of indium oxide and is mainly attributed to the reaction of metallic indium with the oxygen released from the silica matrix by ballistic process. During annealing in oxygen atmosphere the oxygen diffusing into the silica also plays a role in the oxidation of indium NCs.