Hostname: page-component-cd9895bd7-jn8rn Total loading time: 0 Render date: 2024-12-26T16:18:13.687Z Has data issue: false hasContentIssue false
  • English
  • Français

A global assessment of piezoelectric actuated micro-pumps

Published online by Cambridge University Press:  07 July 2010

C. Hernandez ,
Y. Bernard  and
A. Razek
C. Hernandez*
Affiliation:
Laboratoire de Génie Électrique de Paris (LGEP)/SPEE-Labs, SUPELEC, Univ. Paris-Sud, Univ. Pierre et Marie Curie Paris 6, CNRS (UMR 8507), 11 rue Joliot-Curie, Plateau de Moulon, 91192 Gif-sur-Yvette Cedex, France
Y. Bernard
Affiliation:
Laboratoire de Génie Électrique de Paris (LGEP)/SPEE-Labs, SUPELEC, Univ. Paris-Sud, Univ. Pierre et Marie Curie Paris 6, CNRS (UMR 8507), 11 rue Joliot-Curie, Plateau de Moulon, 91192 Gif-sur-Yvette Cedex, France
A. Razek
Affiliation:
Laboratoire de Génie Électrique de Paris (LGEP)/SPEE-Labs, SUPELEC, Univ. Paris-Sud, Univ. Pierre et Marie Curie Paris 6, CNRS (UMR 8507), 11 rue Joliot-Curie, Plateau de Moulon, 91192 Gif-sur-Yvette Cedex, France
*
[email protected]
Get access

Abstract

This article provides an extensive outlook of different types of piezoelectric actuated micro-pumps published in the literature recently. We start by reminding the reader about the conventional operating parameters used to quantify the capabilities of these devices. After this introductory stage, we describe and classify the most prominent micro-pump's geometries found with piezoelectric actuation. At this point we identify the parameters given previously for each pump in order to establish a subsequent discussion in which the trends of different families are compared. Specific attention is given to the particularities of each case namely: flow rates and backpressures.

Type
Review Article
Information
The European Physical Journal - Applied Physics , Volume 51 , Issue 2 , August 2010 , 20101
Copyright
© EDP Sciences, 2010

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

Shawgo, R.S., Grayson, A.C.R., Li, Y., Cima, M.J., Curr. Opin. Solid State Mater. Sci. 6, 329 (2002) CrossRef
Teymoori, M.M., Abbaspour-Sani, E., Sens. Actuat. A: Phys. 117, 222 (2004) CrossRef
Nisar, A., Afzulpurkar, N., Mahaisavariya, B., Tuantranont, A., Sens. Actuat. B: Chem. 130, 917 (2008) CrossRef
Iverson, B.D., Garimella, S.V., Singhal, V., Electron. Cooling 12, 28 (2006)
Lemoff, A.V., Lee, A.P., Sens. Actuat. B: Chem. 63, 178 (2000) CrossRef
Wang, X., Wang, S., Gendhar, B., Cheng, C., Byun, C.K., Li, G., Zhao, M., Liu, S., Trends Anal. Chem. 28, 64 (2009) CrossRef
Darabi, J., Wang, H., J. Microelectromech. Syst. 14, 747 (2005) CrossRef
Takao, H., Miyamura, K., Ebi, H., Ashiki, M., Sawada, K., Ishida, K., Sens. Actuat. A 119, 468 (2005) CrossRef
Galas, J.C., Studer, V., Chen, Y., Microelectron. Eng. 78-79, 112 (2005) CrossRef
Luharuka, R., LeBlanc, S., Bintoro, J.S., Berthelot, Y.H., Hesketh, P.J., Sens. Actuat. A: Phys. 143, 399 (2008) CrossRef
Bosch, D., Heimhofer, B., Mück, G., Seidel, H., Thumser, U., Welser, W., Sens. Actuat. A: Phys. 37-38, 684 (1993) CrossRef
Laser, D., Santiago, J.G., J. Micromech. Microeng. 14, R35 (2004) CrossRef
Chih-Ming Ho, Micro/Nano Technology Systems for Biomedical Applications: Microfluidics, Optics, and Surface Chemistry (Oxford University Press, USA, 2010)
F.M. White, Fluid Mechanics, in McGraw-Hill Series in Mechanical Engineering, 4th edn. (McGraw-Hill, New York, 2001)
Woias, P., Proc. SPIE 4560, 39 (2001) CrossRef
Wang, B., Chu, X., Li, E., Li, L., Ultrasonics 44, 643 (2006) CrossRef
Cui, Q., Liu, C., Zha, X.F., Microfluid. Nanofluid. 3, 377 (2007) CrossRef
N.T. Nguyen, S.T. Wereley, Fundamentals and Applications of Microfluidics (Arten House, Boston, 2006)
Mu, Y.H., Hung, N.P., Ngoi, K.A., Int. J. Adv. Manuf. Technol. 15, 573 (1999) CrossRef
P.L. Reece, Progress in Smart Materials and Structures, edited by T. Kundu (NOVA Science Publishers Inc., New York, 2004)
Zhang, T., Wang, Q.-M., IEEE Trans. Ultrason. Ferroelectr. Freq. Control 53, 463 (2006) CrossRef
Ederer, I., Raetsch, P., Schullerus, W., Tille, C., Zech, U., Sens. Actuat. A 62, 752 (1997) CrossRef
Andersson, H., van der Wijngaart, W., Nilsson, P., Enoksson, P., Stemme, G., Sens. Actuat. B 72, 259 (2001) CrossRef
Cui, Q., Liu, C., Zha, X.F., Int. J. Adv. Manuf. Technol. 36, 516 (2008) CrossRef
Izzo, I., Accoto, D., Menciassi, A. et al., Sens. Actuat. A: Phys. 133, 128 (2007) CrossRef
Gerlach, T., Wurmus, H., Sens. Actuat. A: Phys. 50, 135 (1995) CrossRef
Yih-Lin, C., Jiang-Hong, L., J. Mater. Process. Technol. 192-193, 229 (2007)
Accoto, D., Carrozza, M., Dario, P., J. Micromech. Microeng. 10, 277 (2000) CrossRef
H.K. Ma, B.R. Hou, H.Y. Wu, C.Y. Lin, J.J. Gao, M.C. Kou, Development and application of a diaphragm micro-pump with piezoelectric device, in Symp. on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP, Stresa, Lago Maggiore, Italy, 2007, pp. 273–278
Kan, J., Yang, Z., Peng, T. et al., Sens. Actuat. A: Phys. 121, 156 (2005)
Park, J.H., Yoshida, K., Yokoto, S., J. Mechatron. 9, 687 (1999) CrossRef
Feng, G.H., Kim, E.S., J. Microelectromech. Syst. 14, 699 (2005)
Li, B., Chen, Q.F., Lee, D.G., Woolman, J., Carman, G.P., Sens. Actuat. A 117, 325 (2005) CrossRef
Nguyen, N.T., Truong, T.Q., Sens. Actuat. B 97, 137 (2004) CrossRef
Richter, M., Linnemann, R., Woias, P., Sens. Actuat. 68, 480 (1998) CrossRef
A. Doll, M. Heinrichs, F. Goldschmidtboeing, H.-J. Schrag, U.T. Hopt, P. Woias, Sens. Actuat. A: Phys. 130-131, Selected Papers from Transducers'05, The 13th Int. Conf. on Solid-State Sensors, Actuators and Microsystems, Seoul, Korea, June 2005 and August 2006, pp. 445–453
Lee, D.S., Ko, J.S., Kim, Y.T., Thin Solid Films 486, 285 (2004) CrossRef
Jang, L.-S., Li, Y.-J., Lin, S.-J. et al., Microfluid. Nanofluid. 9, 185 (2007)
Jang, L.-S., Yu, Y.-C., Microsyst. Technol. 14, 241 (2008) CrossRef
I. Kanno, T. Suzuki, H. Hata, H. Shintaku, S. Kawano, H. Kotera, Development and characterization of a traveling wave micro-pump driven by piezoelectric actuators, in The 2nd Int. Symp. on Micro & Nano Technology (ISMNT-2), Hsinchu, Taiwan, 2006, pp. 226–229
B. Cohen, U.S. Patent No. 5961298 (1999)
Z. Wan, D. Wu, D. Cruz, A. Lazarev, Piezoelectric Micropump for Drug Delivery (2001), online publication