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Electron beam induced light emission

Published online by Cambridge University Press:  17 April 2009

A. Ulrich ,
T. Heindl ,
R. Krücken ,
A. Morozov ,
C. Skrobol  and
J. Wieser
A. Ulrich*
Affiliation:
Physik Department E12, Technische Universität München, James-Franck-Str. 1, 85748 Garching, Germany
T. Heindl
Affiliation:
Physik Department E12, Technische Universität München, James-Franck-Str. 1, 85748 Garching, Germany
R. Krücken
Affiliation:
Physik Department E12, Technische Universität München, James-Franck-Str. 1, 85748 Garching, Germany
A. Morozov
Affiliation:
Physik Department E12, Technische Universität München, James-Franck-Str. 1, 85748 Garching, Germany
C. Skrobol
Affiliation:
Physik Department E12, Technische Universität München, James-Franck-Str. 1, 85748 Garching, Germany
J. Wieser
Affiliation:
Coherent GmbH, Zielstatt-Str. 32, 81379 München, Germany
*
[email protected]
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Abstract

Electron beams with a particle energy of typically 12 keV are used for collisional excitation of dense gases. The electrons are sent through ceramic membranes of only 300 nm thickness into gas targets. Excimer light emission from the pure rare gases and from gas mixtures are studied for the development of brilliant VUV and UV light sources. The application of the technology for gas kinetic studies is described and its potential for building very small electron beam pumped lasers is discussed.

Keywords

Type
Research Article
Information
The European Physical Journal - Applied Physics , Volume 47 , Issue 2: 11th International Symposium on High Pressure, Low Temperature Plasma Chemistry (HAKONE XI) , August 2009 , 22815
Copyright
© EDP Sciences, 2009

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