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Diagnostic of 13.56 MHz RF sustained Ar–N2 plasma by optical emission spectroscopy

Published online by Cambridge University Press:  14 January 2009

F. U. Khan
Affiliation:
Department of Physics, Gomal University, D.I. Khan, Pakistan
N. U. Rehman
Affiliation:
Department of Physics, Quaid-i-Azam University, 45320 Islamabad, Pakistan
S. Naseer
Affiliation:
Department of Physics, Peshawar University, Peshawar, Pakistan
M. A. Naveed
Affiliation:
Department of Physics, Quaid-i-Azam University, 45320 Islamabad, Pakistan
A. Qayyum
Affiliation:
National Tokamak Fusion Program, 3329 Islamabad, Pakistan
N. A.D. Khattak
Affiliation:
Department of Physics, Gomal University, D.I. Khan, Pakistan
M. Zakaullah*
Affiliation:
Department of Physics, Quaid-i-Azam University, 45320 Islamabad, Pakistan
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Abstract

Optical Emission Spectroscopy (OES) is used to investigate the effect of argon gas mixing on the electron temperature, the degree of nitrogen dissociation and the active species concentration in a 13.56 MHz radio frequency (RF) sustained nitrogen plasma. The electron temperature is determined from Ar-I emission line intensities by using the modified Boltzmann's plot method and is found to be increased with argon mixing in nitrogen plasma. The concentration of active species $\rm N_2(C ^3\Pi_{\it u})$ and $\rm N_2^+ (B ^2\Sigma_{\it u}^+)$ is monitored in terms of the emission intensities of nitrogen (0–0) bands of the second positive and the first negative systems respectively. The concentration of $\rm N_2 (C^3\Pi_{\it u})$ active species along with the degree of N2-dissociation is appreciably enhanced by argon mixing signifying the role of argon metastables in the excitation and dissociation processes.

Keywords

Type
Research Article
Copyright
© EDP Sciences, 2009

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