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Study of the dc and 100 kHz glow discharges in acetylene-nitrogen mixture by means of optical emission spectroscopy

Published online by Cambridge University Press:  12 September 2002

P. Jamroz
Affiliation:
Institute of Inorganic Chemistry and Metallurgy of Rare Elements, Chemistry Department, Wroclaw University of Technology Wyb. Wyspianskiego 27, 50-370 Wroclaw, Poland
W. Zyrnicki*
Affiliation:
Institute of Inorganic Chemistry and Metallurgy of Rare Elements, Chemistry Department, Wroclaw University of Technology Wyb. Wyspianskiego 27, 50-370 Wroclaw, Poland
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Abstract

The dc and 100 kHz low pressure discharges in acetylene-nitrogen mixture have been studied here. Optical emission spectroscopy was used for identification of active plasma components and to determine plasma temperature. Relative concentrations of H, CH and CN were investigated versus experimental conditions by optical actinometry techniques. Emission intensities of N2 and N $_2^+$ normalized to intensity of argon line were also monitored as a function of experimental parameters. The rotational temperatures from the N $_2^+$ B $^2\Sigma_{\rm u}^+$ -X $^2\Sigma_{\rm g}^+$ (0-0) and CN B2 Σ +-X2 Σ + (0-0) bands and vibrational temperatures from the CN(B2 Σ +-X2 Σ +) and N2 (C $^3\Pi_{\rm u}$ -B $^3\Pi_{\rm g}$ ) spectra weredetermined. Plasma processes and plasma equilibrium state were discussed.

Keywords

Type
Research Article
Copyright
© EDP Sciences, 2002

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