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Study of the dc and 100 kHz glow discharges in acetylene-nitrogen mixture by means of optical emission spectroscopy

Published online by Cambridge University Press:  12 September 2002

P. Jamroz
Affiliation:
Institute of Inorganic Chemistry and Metallurgy of Rare Elements, Chemistry Department, Wroclaw University of Technology Wyb. Wyspianskiego 27, 50-370 Wroclaw, Poland
W. Zyrnicki*
Affiliation:
Institute of Inorganic Chemistry and Metallurgy of Rare Elements, Chemistry Department, Wroclaw University of Technology Wyb. Wyspianskiego 27, 50-370 Wroclaw, Poland
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Abstract

The dc and 100 kHz low pressure discharges in acetylene-nitrogen mixture have been studied here. Optical emission spectroscopy was used for identification of active plasma components and to determine plasma temperature. Relative concentrations of H, CH and CN were investigated versus experimental conditions by optical actinometry techniques. Emission intensities of N2 and N $_2^+$ normalized to intensity of argon line were also monitored as a function of experimental parameters. The rotational temperatures from the N $_2^+$ B $^2\Sigma_{\rm u}^+$ -X $^2\Sigma_{\rm g}^+$ (0-0) and CN B2 Σ +-X2 Σ + (0-0) bands and vibrational temperatures from the CN(B2 Σ +-X2 Σ +) and N2 (C $^3\Pi_{\rm u}$ -B $^3\Pi_{\rm g}$ ) spectra weredetermined. Plasma processes and plasma equilibrium state were discussed.

Keywords

Type
Research Article
Copyright
© EDP Sciences, 2002

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References

Liu, A.Y., Cohen, M., Science 245, 841 (1989) CrossRef
Clay, K.J., Speakman, S.P., Amaratunga, G.A.J., Silva, S.R.P., J. Appl. Phys. 79, 7227 (1996) CrossRef
Wang, J., Durrant, S.F., de Moraes, M.A.B., J. Non-Cryst. Solids 262, 216 (2000) CrossRef
Grillo, S.E., Hellgren, N., Serin, V., Broitman, E., Colliex, C., Hultman, L., Kihn, Y., Eur. Phys. J. AP 13, 97 (2000) CrossRef
Sangwook Wee, Seung Min Park, , Opt. Commun. 165, 199 (1999)
Nemes, L., Mohai, M., Donko, Z., Bertoti, I., Spectrochim. Acta A 56, 761 (2000) CrossRef
Fujimoto, F., Ogata, K., Jpn. J. Appl. Phys. 32, L420 (1993) CrossRef
Duten, X., Rousseau, A., Gicquel, A., Leprince, P., J. Appl. Phys. 86, 5299 (1999) CrossRef
Chatei, H., Bougdira, J., Remy, M., Almot, P., Surf. Coating Technol. 116-119, 1233 (1999) CrossRef
Durrant, S.F., Marcal, N., Castro, S.G., Vinhas, R.C.G., Bica de, M.A. Moraes, J.H. Nicola, Thin Solid Films 259, 139 (1995) CrossRef
Chu, H.N., den Hartog, E.A., Lefkow, A.R., Jacobs, J., Anderson, L.W., Lagally, M.G., Lawler, J.E., Phys. Rev. A 44, 3796 (1991) CrossRef
Cramarossa, F., Ferraro, G., J. Quant. Spectrosc. Radiat. Transfer 18, 471 (1977) CrossRef
Gorbal, M.R., Savadatti, M.I., Chem. Rev. 82, 527 (1982) CrossRef
Avtaeva, S.V., Mamybekov, M.Z., Otorbaev, D.K., J. Phys. D: Appl. Phys. 30, 3000 (1997) CrossRef
Donnelly, V.M., Malyshev, M.V., Appl. Phys. Lett. 77, 2467 (2000) CrossRef
Chelouah, A., Marode, E., Hartmann, G., Achat, S., J. Phys. D: Appl. Phys. 27, 940 (1994) CrossRef
Loureiro, J., Ricard, A., J. Phys. D: Appl. Phys. 26, 163 (1993) CrossRef
Coburn, J.W., Chen, M., J. Appl. Phys. 51, 3134 (1980) CrossRef
Bhattacharyyas, S., Vallee, C., Cardinaud, C., Turbang, G., J. Appl. Phys. 87, 7524 (2000) CrossRef
Sung, S.L., Tseng, C.H., Chiang, F.K., Guo, X.J., Liu, X.W., Shih, H.C., Thin Solid Films 340, 169 (1999) CrossRef
Durrant, S.F., Rangel, E.C., Bica de, M.A. Moraes, J. Vac. Sci. Technol. A 13, 1901 (1995) CrossRef
Zhou, D., Krauss, A.R., Qin, L.C., McGauley, T.G., Gruen, D.M., Corrigan, T.D., Chang, R.P.H., Gnaser, H., J. Appl. Phys. 82, 4546 (1997) CrossRef
Fuji, T., Chem. Phys. Lett. 313, 733 (1999) CrossRef
Safrany, D.S., Jatser, W., J. Phys. Chem. 72, 3305 (1968) CrossRef
G. Herzberg, Molecular Spectra and Molecular Structure. Vol. I. Spectra of Diatomic Molecules, 2nd edn. (D. Van Nostrand Company Inc., New York, 1957)
K.P. Huber, G. Herzberg, Molecular Spectra and Molecular Structure. Vol. IV. Constant of Diatomic Molecules (D. Van Nostrand Company Inc., New York, 1979)
Zare, R.N., Larsson, E.O., Berg, R.A., J. Mol. Spectrosc. 117, 117 (1965) CrossRef
Hornkohl, J.O., Paringger, Ch., Lewis, J.W.L., J. Quant. Spectrosc. Radiat. Transfer 46, 405 (1991) CrossRef