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Optical properties and thermal stability of alumina films grown by pulsed laser deposition

Published online by Cambridge University Press:  03 October 2013

Priyanka Nayar  and
Atul Khanna
Priyanka Nayar
Affiliation:
Department of Physics, Guru Nanak Dev University, Amritsar, Punjab 143005, India
Atul Khanna*
Affiliation:
Department of Physics, Guru Nanak Dev University, Amritsar, Punjab 143005, India
*
a e-mail: [email protected]
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Abstract

Thin films of aluminum oxide of thickness 293–433 nm were grown on fused silica substrates by pulsed laser deposition (PLD) of an alumina target with KrF excimer laser radiation. The effects of oxygen background pressure (0.5–50 Pa) and substrate temperature of room temperature to 800 °C were investigated on thickness, crystal-structure, optical properties and thermal stability of alumina films. It was found that PLD grows a weakly crystalline aluminum oxide film at in situ substrate temperature of 800 °C and oxygen background pressure of 5 Pa. Post-deposition annealing studies of amorphous alumina sample prepared at in situ temperature of 600 °C found that crystallization starts at 800 °C and forms δ alumina phase.

Type
Research Article
Information
The European Physical Journal - Applied Physics , Volume 64 , Issue 1 , October 2013 , 10301
Copyright
© EDP Sciences, 2013

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