Published online by Cambridge University Press: 05 July 2013
The transmission line characteristics of an individual aluminum metallic nanowire up to 100 GHz are presented in this paper. We have built a reliable framework for characterizing such nanowires using a specially designed coplanar waveguide platform. We systematically estimate the pad parasitics, contact impedance and transmission line parameters based on an equivalent circuit model and cascade-based de-embedding theory. This is the first time that such external parasitic elements have been successfully removed from a nanoscale transmission line. The extracted frequency-dependent electrical responses show good signal levels and a high degree of reproducibility.
Contribution to the Topical Issue “International Semiconductor Conference Dresden-Grenoble – ISCDG 2012”, Edited by Gérard Ghibaudo, Francis Balestra and Simon Deleonibus.