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Examination of an ICP magnesium plasma by spectroscopy and double Langmuir probe measurements

Published online by Cambridge University Press:  05 July 2012

K.T.A.L. Burm
K.T.A.L. Burm*
Affiliation:
PlasmAIX for Plasma Research, Heimerik 47, 2440 Geel, Belgium
*
ae-mail: [email protected]
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Abstract

Optical emission spectroscopy and double Langmuir probe measurements are performed on a magnesium plasma from an inductively coupled plasma source. These measurements are performed in order to examine their feasibility to characterize the plasma, its degree of ionization and its deviation from thermal equilibrium.

Type
Research Article
Information
The European Physical Journal - Applied Physics , Volume 58 , Issue 3 , June 2012 , 30802
Copyright
© EDP Sciences, 2012

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