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Effect of the magnetic field on the plasma parameters in the cathode fall region of the DC-glow discharge
Published online by Cambridge University Press: 15 May 2001
Abstract
Low-density plasma is generated in a cylindrical DC magnetron discharge tube. Distribution of the magnetic field strengths in the radial and axial directions is drawn. Langmuir probe data are obtained at the edge of the cathode fall region of Ar gas discharge at pressure range from 0.5 to 4.0 torr. In the presence of the magnetic field, values of the electron temperature Te are smaller than that without magnetic field. While plasma density Ne increases by a factor of two than that without magnetic field. The electron density increases with magnetic field due to electron magnetic confinement. Also, the radial distribution of Te and Ne in the cathode fall region of the glow discharge is discussed. The magnetic field drift velocity plays an important role to make the radial distribution of Te and Ne slightly changed.
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- © EDP Sciences, 2001
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