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Dielectric properties of (Ba0.67Sr0.33)TiO3 thin film for uncooled infrared focal plane arrays

Published online by Cambridge University Press:  12 September 2002

S. J. Liu ,
C. Y. Xu ,
X. B. Zeng  and
B. F. Zhao
S. J. Liu*
Affiliation:
Department of Electronics Science and Technology, Huazhong University of Science and Technology, Wuhan 430074, P.R. China
C. Y. Xu
Affiliation:
Department of Electronics Science and Technology, Huazhong University of Science and Technology, Wuhan 430074, P.R. China
X. B. Zeng
Affiliation:
Department of Electronics Science and Technology, Huazhong University of Science and Technology, Wuhan 430074, P.R. China
B. F. Zhao
Affiliation:
Department of Electronics Science and Technology, Huazhong University of Science and Technology, Wuhan 430074, P.R. China
*
[email protected]
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Abstract

The (Ba0.67Sr0.33)TiO3 thin film for dielectric bolometer mode of uncooled infrared focal plane arrays prepared on Pt/Ti/SiO2/Si by radio-frequency magnetron sputtering has been investigated focusing on the dielectric properties. X-ray diffractometer shows the BST films to be well perovskite structure. These films exhibit good surface morphology. The dielectric properties of the BST thin films have been measured as a function of temperature using a HP4284A LCR meter. According to the dielectric constant-temperature curve, the Curie temperature of the BST thin film is about 30 °C, around room temperature. The maximum change in the dielectric constant is as large as 78/k, and more than 21% relative change in the dielectric constant has been obtained.

Keywords

Type
Research Article
Information
The European Physical Journal - Applied Physics , Volume 19 , Issue 3 , September 2002 , pp. 181 - 183
Copyright
© EDP Sciences, 2002

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