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Detection of an evanescent field scattered by silicon tipsin an apertureless scanning near-field optical microscope*

Published online by Cambridge University Press:  15 May 1999

R. Laddada
Affiliation:
Laboratoire de Nanotechnologie et d'Instrumentation Optique (LNIO), Université de technologie de Troyes, 12 rue Marie Curie, B.P. 2060, 10010 Troyes Cedex, France
S. Benrezzak
Affiliation:
Laboratoire de Nanotechnologie et d'Instrumentation Optique (LNIO), Université de technologie de Troyes, 12 rue Marie Curie, B.P. 2060, 10010 Troyes Cedex, France
P. M. Adam*
Affiliation:
Laboratoire de Nanotechnologie et d'Instrumentation Optique (LNIO), Université de technologie de Troyes, 12 rue Marie Curie, B.P. 2060, 10010 Troyes Cedex, France
G. Viardot
Affiliation:
Laboratoire de Nanotechnologie et d'Instrumentation Optique (LNIO), Université de technologie de Troyes, 12 rue Marie Curie, B.P. 2060, 10010 Troyes Cedex, France
J. L. Bijeon
Affiliation:
Laboratoire de Nanotechnologie et d'Instrumentation Optique (LNIO), Université de technologie de Troyes, 12 rue Marie Curie, B.P. 2060, 10010 Troyes Cedex, France
P. Royer
Affiliation:
Laboratoire de Nanotechnologie et d'Instrumentation Optique (LNIO), Université de technologie de Troyes, 12 rue Marie Curie, B.P. 2060, 10010 Troyes Cedex, France
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Abstract

We describe how a commercial silicon cantilever can be used both as a force probe and a local scatterer of light. This tip can thus be used as the key element of an apertureless Scanning Near-field Optical Microscope (SNOM) combined with an Atomic Force Microscope (AFM). We use a Total Internal Reflection (TIR) illumination to provide a Fresnel evanescent wave with well-defined characteristics. We show how the weak signal issued from the near-field scattered by the tip can be extracted from the background noise. Finally we present how a signal related to the near field can also be obtained when the tip is oscillated at a frequency close to the resonance frequency of the cantilever. These results are compared with a simulation of the lock-in detection. Finally we describe the role of the vibration amplitude on the signal.

Keywords

Type
Research Article
Copyright
© EDP Sciences, 1999

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Footnotes

*

This paper was presented at the special Colloquium CFMCP held atStrasbourg-Illkirch the July 1st-3rd, 1998.

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