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Comment on "Diagnostics of 13.56 MHz RF sustained Ar-N2 plasma by optical emission spectroscopy" by F.U. Khan, N.U. Rehman, S. Naseer, M.A. Naveed, A. Qayyum, N.A.D. Khattak and M. Zakaullah

Published online by Cambridge University Press:  05 June 2009

N. Sadeghi  and
F. J. Gordillo-Vazquez
N. Sadeghi*
Affiliation:
Laboratoire de Spectrométrie Physique, Université Joseph Fourier and CNRS, BP 87, 38402 Saint Martin d'Hères, France Laboratoire des Technologies de la Microélectronique, CNRS, 17 rue des Martyrs, 38054 Grenoble Cedex 09, France
F. J. Gordillo-Vazquez
Affiliation:
Instituto de Astrofísica de Andalucia, CSIC, P.O. Box 3004, 18080 Granada, Spain
*
[email protected]
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Abstract

Several important errors and misinterpretations present in a recent publication by Khan et al. [Eur. Phys. J. Appl. Phys. 45, 11002 (2009)] are pointed out and discussed. In particular, it is shown that the method used to calculate the rate coefficients for the electron impact excitation of 3p 54p and 3p 55p states of argon is incorrect and leads to unrealistically high rate coefficients.

Keywords

Type
Article Commentary
Information
The European Physical Journal - Applied Physics , Volume 47 , Issue 1: 4th Colloquium Interdisciplinary in Instrumentation (C2I 2007) , July 2009 , 11001
Copyright
© EDP Sciences, 2009

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References

Khan, F.U., Rehman, N.U., Naseer, S., Naveed, M.A., Qayyum, A., Khattak, N.A.D., Zakaullah, M., Eur. Phys. J. Appl. Phys. 45, 11002 (2009) CrossRef
Gordillo-Vazquez, F.J., Camero, M., Gomez-Aleixandre, C., Plasma Sources Sci. Technol. 15, 42 (2006) CrossRef
Fujimoto, T., J. Phys. Soc. Jpn 47, 265 (1979) CrossRef
Wiese, W.L., Brault, J.W., Danzmann, K., Helbig, V., Kock, M., Phys. Rev. A 39, 24611 (1989) CrossRef
Tsurubuchi, S., Miyazaki, T., Motohashi, K., J. Phys. B: At. Mol. Opt. Phys. 29, 1785 (1996) CrossRef
Inoue, G., Setser, D.W., Sadeghi, N., J. Chem. Phys. 76, 977 (1982) CrossRef
Lieberman, M.A., Lichtenberg, A.J., Principles of Plasma discharges and Materials Processing (John Wiley & Sons, New York, 1994); V. Vahedi, M.A. Lieberman, G. DiPeso, T.D. Rognlien, D. Hewett, J. Appl. Phys. 78, 1446 (1995)
Rehman, N.U., Zakaullah, M., Khan, F.U., Naseer, S., J. Appl. Phys. 104, 123304 (2008) CrossRef
http://physics.nist.gov/PhysRefData/ASD/index.html
Lofthus, A., Krupenie, P.H., J. Phys. Chem. Ref. Data. 6, 113 (1977) CrossRef
Wang, Q., Doll, F., Donnelly, V.M., Economou, D.J., Sadeghi, N., Franz, G.F., J. Phys. D: Appl. Phys. 40, 4202 (2007) CrossRef