Hostname: page-component-cd9895bd7-dzt6s Total loading time: 0 Render date: 2024-12-26T06:00:03.997Z Has data issue: false hasContentIssue false
  • English
  • Français

3D analysis of buried interfaces using interference microscopy

Published online by Cambridge University Press:  15 July 2004

A. Benatmane  and
P. C. Montgomery
A. Benatmane
Affiliation:
Laboratoire PHASE, CNRS - STIC, UPR 292, 23 rue du Lœss, BP 20 CR, F-67037 Strasbourg Cedex 2, France
P. C. Montgomery*
Affiliation:
Laboratoire PHASE, CNRS - STIC, UPR 292, 23 rue du Lœss, BP 20 CR, F-67037 Strasbourg Cedex 2, France
*
[email protected]
Get access

Abstract

The use of white light interference microscopy for the non-destructive 3D measurement of an interface buried under a transparent layer has been investigated. Test samples consisting of step structures (< 2 µm) etched in silicon and then covered by a thick (> 1 µm) layer of resin have been studied. The 3D morphology of the buried step was successfully measured through the transparent layer. Comparison of the step heights measured before and after the deposition of the resin layer shows a reduction in the estimated measurement precision from 4% in air to 9% through the transparent layer. The additional errors arise from optical aberrations due to the roughness and the geometry of the air/resin surface, the thickness of the layer and possibly from inhomogeneities in the refractive index of the layer that contribute to a degradation of the wavefront reflected from the interface.

Keywords

Type
Research Article
Information
The European Physical Journal - Applied Physics , Volume 27 , Issue 1-3: Tenth International Conference on Defects: Recognition, Imaging and Physics in Semiconductors (DRIP X) , July 2004 , pp. 411 - 414
Copyright
© EDP Sciences, 2004

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

Caber, P. J., Appl. Opt. 32, 3438 (1993) CrossRef
Montgomery, P. C., Ponpon, J. P., Sieskind, M., Draman, C., Phys. Stat. Sol. C 0, 1044 (2003) CrossRef
Kim, S. W., Kim, G. H., Appl. Opt. 38, 5968 (1999) CrossRef
Montgomery, P. C., Benhaddou, D., Montaner, D., Appl. Phys. Lett. 71, 1768 (1997) CrossRef
Benhaddou, D., Montgomery, P. C., Montaner, D., Bonnafe, J., J. Mod. Opt. 48, 533 (2001) CrossRef
Hariharan, P., Roy, M., J. Mod. Opt. 43, 1797 (1996) CrossRef
Perrot, O., Guinvarc'h, L., Benhaddou, D., Montgomery, P. C., Rimet, R., Boulard, B., Jacoboni, C., J. Non-Cryst. Solids 184, 257 (1995) CrossRef
Caber, P. J., Appl. Opt. 32, 3438 (1993) CrossRef
K. Creath, in Fringe 97: Automatic Processing of Fringe Patterns, 1997, edited by W. Jüptner, W. Osten (Academie Verlag, Berlin, 1997), p. 52
A. Benatmane, Ph.D. thesis, Université Louis Pasteur, Strasbourg, France, 2002
Flury, M., Benatmane, A., Gérard, P., Montgomery, P. C., Fontaine, J., Engel, T., Schunk, J. P., Opt. Eng. 41, 2407 (2002)