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Modeling and experiment of a planar 3-DOF parallel micromanipulator

Published online by Cambridge University Press:  19 May 2011

Yi Yue ,
Feng Gao ,
Zhenlin Jin  and
Xianchao Zhao
Yi Yue
Affiliation:
State Key Laboratory of Mechanical System and Vibration, Shanghai Jiaotong University, Shanghai 200240, P. R. China
Feng Gao*
Affiliation:
State Key Laboratory of Mechanical System and Vibration, Shanghai Jiaotong University, Shanghai 200240, P. R. China
Zhenlin Jin
Affiliation:
College of Mechanical Engineering, Yanshan University, Qinhuangdao 066004, P. R. China
Xianchao Zhao
Affiliation:
State Key Laboratory of Mechanical System and Vibration, Shanghai Jiaotong University, Shanghai 200240, P. R. China
*
*Corresponding author. E-mail: [email protected]
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Summary

In this paper, a planar 3-DOF XYγ parallel micromanipulator with monolithic structure is presented. The micromanipulator is driven by three piezoelectric (PZT) actuators. To achieve highly accurate control, a new approach investigating the relationship among input-force, payload, stiffness, and displacement (IPSD model) of the XYγ micromanipulator is proposed in analytical style, and the analytical expression of the relationship between driving voltages of PZT actuators and outputs of end-effector is deduced based on the IPSD model. Finally, in order to verify the IPSD model, the simulations by finite element method and experiment are performed. The micromanipulator can be used to do microtasks that need the manipulator perform only planar motion, such as microoperation and microassembly, and the proposed IPSD model is useful for both digital control and design of the XYγ micromanipulator.

Keywords

Compliant mechanismsParallel micromanipulatorStiffnessFlexure hinge
Type
Articles
Information
Robotica , Volume 30 , Issue 2 , March 2012 , pp. 171 - 184
Copyright
Copyright © Cambridge University Press 2011

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