Hostname: page-component-78c5997874-mlc7c Total loading time: 0 Render date: 2024-11-06T00:59:58.634Z Has data issue: false hasContentIssue false

Modeling and experiment of a planar 3-DOF parallel micromanipulator

Published online by Cambridge University Press:  19 May 2011

Yi Yue
Affiliation:
State Key Laboratory of Mechanical System and Vibration, Shanghai Jiaotong University, Shanghai 200240, P. R. China
Feng Gao*
Affiliation:
State Key Laboratory of Mechanical System and Vibration, Shanghai Jiaotong University, Shanghai 200240, P. R. China
Zhenlin Jin
Affiliation:
College of Mechanical Engineering, Yanshan University, Qinhuangdao 066004, P. R. China
Xianchao Zhao
Affiliation:
State Key Laboratory of Mechanical System and Vibration, Shanghai Jiaotong University, Shanghai 200240, P. R. China
*
*Corresponding author. E-mail: [email protected]

Summary

In this paper, a planar 3-DOF XYγ parallel micromanipulator with monolithic structure is presented. The micromanipulator is driven by three piezoelectric (PZT) actuators. To achieve highly accurate control, a new approach investigating the relationship among input-force, payload, stiffness, and displacement (IPSD model) of the XYγ micromanipulator is proposed in analytical style, and the analytical expression of the relationship between driving voltages of PZT actuators and outputs of end-effector is deduced based on the IPSD model. Finally, in order to verify the IPSD model, the simulations by finite element method and experiment are performed. The micromanipulator can be used to do microtasks that need the manipulator perform only planar motion, such as microoperation and microassembly, and the proposed IPSD model is useful for both digital control and design of the XYγ micromanipulator.

Type
Articles
Copyright
Copyright © Cambridge University Press 2011

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

1.Merlet, J.-P., Parallel Robots (Kluwer Academic Publishers, London, 2000).Google Scholar
2.Howell, L. L., Compliant Mechanisms (Wiley, New York, 2001).Google Scholar
3.Scire, F. and Teague, C., “Piezodriven 50 μm range stage with subnanometer resolution,” Rev. Sci. Instrum. 49 (12), 17351741 (1978).Google Scholar
4.Hudgens, J. C. and Tesar, D., “A Fully-Parallel Six Degree-of-Freedom Micromanipulator: Kinematic Analysis and Dynamic Model,” Proceedings of the 20th Biennial ASME Mechanisms Conference Trends and Development in Mechanism Machines and Robotics (1988), vol. 15, pp. 29–37.Google Scholar
5.Gao, P., Swei, S.-M. and Yuan, Z., “A new piezodriven precision micropositioning stage utilizing flexure hinges,” J. Nanotechnology 10, 394398 (1999).Google Scholar
6.Li, Y. and Xu, Q., “Modeling and performance evaluation of a flexure-based XY parallel micromanipulator,” Mech. Mach. Theory 44 (12), 21272152 (2009).CrossRefGoogle Scholar
7.Yao, Q., Dong, J. and Ferreira, P. M., “A novel parallel-kinematics mechanisms for integrated, multi-axis nanopositioing Part 1: Kinematics and design for fabrication,” J. Precis. Eng. 32, 2033 (2007).Google Scholar
8.Dong, J., Yao, Q. and Ferreira, P. M., “A novel parallel-kinematics mechanisms for integrated, multi-axis nanopositioing Part 2: Dynamics, control and performance analysis,” J. Precis. Eng. 32, 719 (2007).Google Scholar
9.Pham, H.-H. and Chen, I.-M., “Stiffness modeling of flexure parallel mechanism,” J. Precis. Eng. 29, 467478 (2005).Google Scholar
10.Tang, X., Chen, I.-M. and Li, Q., “Design and nonlinear modeling of a large-displacement XYZ flexure parallel mechanism with decoupled kinematic structure,” Rev. Sci. Instrum. 77, 115101 (2006).Google Scholar
11.Yue, Y., Gao, F., Zhao, X. and Ge, Q. J., “Relationship among input-force, payload, stiffness, and displacement of a 3-DOF perpendicular parallel micro-manipulator,” Mech. Mach. Theory 45 (5), 756771 (2010).Google Scholar
12.Gao, P. and Swei, S.-M., “A six-degree-of-freedom micro-manipulator based on piezoelectric translators,” Nanotechnology 10, 447452 (1999).Google Scholar
13.Yue, Y., Gao, F., Zhao, X. and Ge, Q. J., “Relationship among input-force, payload, stiffness, and displacement of a 6-DOF perpendicular parallel micromanipulator,” J. Mech. Robot. 2 (1): 011007 (2010).CrossRefGoogle Scholar
14.Chung, G.-J. and Choi, K.-B., “Development of Nano Order Manipulation System Based on 3-PPR Planar Parallel Mechanism,” Proceedings of the 2004 IEEE International Conference on Robotics and Biomimetics, Shenyang, China (2004), pp. 612616.Google Scholar
15.Lu, T., Handley, D. C., Yong, Y. K. and Eales, C., “A three-DOF compliant micromotion stage with flexure hinges,” J. Ind. robot 31 (4), 355361 (2004).CrossRefGoogle Scholar
16.Yong, Y. K. and Lu, T.-F., “Kinetostatic modeling of 3-RRR Compliant micro-motion stages with flexure hinges,” Mech. Mach. Theory 44, 11561175 (2009).Google Scholar
17.Yong, Y. K. and Lu, T.-F., “The effect of the accuracies of flexure hinge equations on the output compliances of planar micro-motion stages,” Mech. Mach. Theory 43, 347363 (2008).CrossRefGoogle Scholar
18.Yi, B.-J., Chung, G. B., Na, H. Y., Kim, W. K. and Suh, H., “Design and experiment of a 3-DOF parallel micromechanism utilizing flexure hinges,” IEEE Trans. Robot. Autom. 19 (4), 604612 (2003).Google Scholar
19.Xu, Q. and Li, Y., “Structure Improvement of an XY Flexure Micromanipulator for Micro/Nano Scale Manipulator,” Proceedings of the 17th World Congress IFAC, Korea (2008), pp. 1273312738.Google Scholar
20.Paros, J. M. and Weisbord, L., “How to design flexure hinges,” Mach. Des. 37, 151156 (1965).Google Scholar
21.Joshi, S. A. and Tsai, L.-W., “Jacobian analysis of limited-DOF parallel manipulators,” J. Mech. Des. 124, 254258 (2002).Google Scholar
22.Gao, F., Zhang, J., Chen, Y. and Jin, Z., “Development of a New Type 6-DOF Parallel Micro-Manipulator and its Control System,” Proceedings of the 2003 International Conference on Robotics, Intelligent systems and Signal Processing, (2003) pp. 715–720.Google Scholar
23.Bandyopadhyay, S. and Ghosal, A., “An algebraic formulation of static isotropy and design of statically isotropic 6–6 Stewart platform manipulators,” Mech. Mach. Theory 44 (7), 13601370 (2009).CrossRefGoogle Scholar
24.Huijun, Z. and Feng, G., The Progress of Modern Mechanism (in Chinese), (Higher Education Press, BeiJing, 2007).Google Scholar
25.Vorndran, S., The World of Micro-and Nanopositioning 2005/2006 (PI-Polytec Group, Germany, 2005).Google Scholar