Hostname: page-component-cd9895bd7-dzt6s Total loading time: 0 Render date: 2024-12-23T11:51:06.061Z Has data issue: false hasContentIssue false
  • English
  • Français

A 4-degrees-of-freedom microrobot with nanometer resolution

Published online by Cambridge University Press:  09 March 2009

J.-M. Breguet  and
Ph. Renaud
Ph. Renaud
Affiliation:
Institut de microtechnique (IMT), Swiss Federal Institute of Technology (EPFL), CH–1015 Lausanne (Switzerland)
Get access Rights & Permissions [Opens in a new window]

Summary

A new type of microrobot is described. Its simple and compact design is believed to be of promise in the microrobotics field. Stepping motion allows speeds up to 4mm/s. Resolution smaller than 10 nm is achievable. Experiments in an open-loop motion demonstrated a repeatability better than 50µm on a 10 mm displacement at an average speed of 0.25 mm/s. A position feedback based on a microvision system will be developed in order to achieve a submicron absolute position accuracy.

Keywords

MicrorobotNanometer resolutionCompact design.
Type
Article
Information
Robotica , Volume 14 , Issue 2 , March 1996 , pp. 199 - 203
Copyright
Copyright © Cambridge University Press 1996

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

1.Futami, Shigeru, “Nanometer positioning and its microdynamics” Nanotechnology 1, 31–37 (1990).CrossRefGoogle Scholar
2.Goto, Hiroshi, “XY stage capable of positioning in submicron order” J. Robotics & Mechatronics 1, 333–337 (1989).CrossRefGoogle Scholar
3.Yang, Renyi et al. , “Design and analysis of low profile micro-positioning stage” Precision Machining: Technology and Machine Development and Improvement ASME 1992 PED (1992) 58, pp. 131–142.Google Scholar
4. PI, Physik Instrument, “Products for micropositioning” Product Line Catalog (1993).Google Scholar
5.Besocke, K., “An easily operable scanning tunneling microscope” Surface Science 181, 145–153 (1987).CrossRefGoogle Scholar
6.Howald, L. et al. , “Multifunctional probe microscope for facile operation in ultrahigh vacuum” Appl. Phys. Letters 63, No. 1, 117–119 (1993).CrossRefGoogle Scholar
7.Sulzmann, A., “A virtual reality based interface for microtelemanipulation” ICAT'94, Proceedings(July 14–15, 1994) pp. 255–262.Google Scholar