Studies of our own Galaxy and observations of external galaxies have suggested that stellar ultraviolet radiation can ionize vast volumes of a galaxy and that far-ultraviolet radiation impinging on neutral cloud surfaces is responsible for a large fraction of the observed far-infrared (FIR) spectral line emission that cools the gas (Crawford & al. (1985)). Fine structure (FS) emission lines can be used as tracers of nebular conditions such as density, excitation and ionization. By virtue of their different excitation potentials and critical densities, FS emission lines provide an insight into the energetics and chemical composition of the regions from which they originate. The far infrared [C ii]158 μm, [O i]145 μm and [O i]63 μm fine structure emission lines obtained with the Infrared Space Observatory (ISO) from 35 extragalactic sources are examined to investigate the chemical abundances and large scales physical properties of these sources. Line fluxes are compared with a grid of PDR models previously computed using the UCL_PDR code. We overplotted our model predictions against flux ratios from the [C ii]158 μm and [O i]63 μm and 145 μm ISO LWS fluxes. In this section we will only discuss the sensitivity of the ratios to changes in the input parameters. We find that the average radiation field G0 is 60–8 × 102 and the average density nH 104−9 × 104 cm−3. While ionised carbon, because of its ionisation potential, can be found in both neutral gas and ionised gas clouds, species such as ionised nitrogen [N ii], with ionisation potential of 14.53 eV, can arise only from H ii regions. The 11 sources that have detections of both [C ii] 158 μm and [N ii] 122 μm have mean and median [C ii]158/[N ii]122 flux ratios of 10.2 and 5.9 respectively. A H ii region [C ii]158/[N ii]122 ratio of 1.6 implies that H ii region contribute only 16% (mean case) and 27% (median case) of the overall [C ii] 158 μm flux that is observed. We used the above predicted H ii region [C ii]158/[N ii]122 ratio of 1.6 along with the observed [N ii] 122 μm fluxes, to correct the observed [C ii] 158 μm flux of these 11 sources for H ii region contributions. We estimate that 10-60% of the [C ii] is excited in ionised regions. When accounting for the contribution to the [C ii] 158 μm by H ii regions we found that our models fitted better the observations. We modeled the oxygen emission line profile emitted from an ensemble of PDRs and found a clear [O i] 63 μm self-absorbed profile. We estimate that approximately 20-70% of the [O i] 63 μm intensity may be suppressed through oxygen self-absorption depending on the physical parameters of the PDR regions. This work has been submitted for publication to MNRAS, Vasta et al. (2009).