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Towards sub-100-nm X-ray microscopy for tomographic applications

Published online by Cambridge University Press:  29 February 2012

P. Bruyndonckx ,
A. Sasov  and
B. Pauwels
P. Bruyndonckx*
Affiliation:
Skyscan, Kartuizersweg 3B, 2550 Kontich, Belgium
A. Sasov
Affiliation:
Skyscan, Kartuizersweg 3B, 2550 Kontich, Belgium
B. Pauwels
Affiliation:
Skyscan, Kartuizersweg 3B, 2550 Kontich, Belgium
*
a)Author to whom correspondence should be addressed. Electronic mail: [email protected]
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Abstract

We have demonstrated that structures down to 150 nm can be visualized in X-ray projection images using nanofocus X-ray sources. Due to their unlimited depth of focus, they do not possess a limit on the specimen size. This is essential for three-dimensional tomographic imaging of samples with a diameter larger than a few microns. Further simulation studies have shown that optimization of the detector response curve and switching from a reflective X-ray target to a transmission target should allow us to reach sub-100-nm resolutions.

Keywords

nanotomographynanofocal spot sizeX-ray microscopy
Type
Technical Articles
Information
Powder Diffraction , Volume 25 , Issue 2 , June 2010 , pp. 157 - 160
Copyright
Copyright © Cambridge University Press 2010

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References

Brunke, Stock O. (2008). Proceedings of Spie: Developments in X-ray Tomography VI, edited by S. R., (Society of Photo Optical, Bellingham, WA), Vol. 7078.Google Scholar
Chu, Y. S. et al. (2008). “Hard X-ray microscopy with Fresnel zone plates reaches 40 nm Rayleigh resolution,” Appl. Phys. Lett. APPLAB 92, 103119.10.1063/1.2857476Google Scholar
Cowley, J. M. (1990). Diffraction Physics (North-Holland, Amsterdam).Google Scholar
Demers, H. (2004). WIN X-RAY, Version 1.2.1.13 〈http://montecarlomodeling.mcgill.ca/software/winxray/winxray.html〉.Google Scholar
Hamamatsu. (2009). Microfocus X-ray source series 〈http://sales.hamamatsu.com/assets/pdf/catsandguides/MFX_TLSO1063E04.pdf〉.Google Scholar
Jan, S., Santin, G., Strul, D., Staelens, S., Assié, K., Autret, D., Avner, S., Barbier, R., Bardiès, M., Bloomfield, P. M., Brasse, D., Breton, V., Bruyndonckx, P., Buvat, I., Chatziioannou, A. F., Choi, Y., Chung, Y. H., Comtat, C., Donnarieix, D., Ferrer, L., Glick, S. J., Groiselle, C. J., Guez, D., Honore, P. -F., Kerhoas-Cavata, S., Kirov, A. S., Kohli, V., Koole, M., Krieguer, M., van der Laan, D. J., Lamare, F., Largeron, G., Lartizien, C., Lazaro, D., Maas, M. C., Maigne, L., Mayet, F., Melot, F., Merheb, C., Pennacchio, E., Perez, J., Pietrzyk, U., Rannou, F. R., Rey, M., Schaart, D. R., Schmidtlein, C. R., Simon, L., Song, T. Y., Vieira, J. M., Visvikis, D., Van de Walle, R., Wieërs, E., and Morel, C. (2004). “GATE: A simulation toolkit for PET and SPECT,” Phys. Med. Biol. PHMBA7 49, 4543–4561.10.1088/0031-9155/49/19/007CrossRefGoogle Scholar
Suzuki, Y. (2008). Making hard X-ray micro-focus beam with Fresnel zone plate optics, Spring-8 summer school text 〈http://cheiron2008.spring8.or.jp/bl_text/12_47XU.pdf〉.Google Scholar
Tohken. (2009). 0.4 mm focus X-ray inspection system TUX-3000W, 〈http://www.tohken.co.jp/en/viw1.php?prod100=87&pic=ti_xr.gif〉.Google Scholar