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Texture and strain analysis of tungsten films via Tilt-A-Whirl methodology

Published online by Cambridge University Press:  01 August 2022

Mark A. Rodriguez Open the ORCID record for Mark A. Rodriguez [Opens in a new window] ,
Jamin Pillars ,
Nichole R. Valdez ,
James J. M. Griego ,
Matthew V. Gallegos ,
John A. Krukar ,
Andrew Polonsky  and
Steven L. Wolfley
Mark A. Rodriguez*
Affiliation:
Sandia National Laboratories, Albuquerque, NM 87185-1411, USA
Jamin Pillars
Affiliation:
Sandia National Laboratories, Albuquerque, NM 87185-1411, USA
Nichole R. Valdez
Affiliation:
Sandia National Laboratories, Albuquerque, NM 87185-1411, USA
James J. M. Griego
Affiliation:
Sandia National Laboratories, Albuquerque, NM 87185-1411, USA
Matthew V. Gallegos
Affiliation:
Sandia National Laboratories, Albuquerque, NM 87185-1411, USA
John A. Krukar
Affiliation:
Sandia National Laboratories, Albuquerque, NM 87185-1411, USA
Andrew Polonsky
Affiliation:
Sandia National Laboratories, Albuquerque, NM 87185-1411, USA
Steven L. Wolfley
Affiliation:
Sandia National Laboratories, Albuquerque, NM 87185-1411, USA
*
a)Author to whom correspondence should be addressed. Electronic mail: [email protected]
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Abstract

Tungsten (W) films have many applications in the semiconducting industry for sensor technology. Deposition conditions can significantly impact the resulting W films in terms of the phases present (α-BCC or β-A12), microstructural grain orientation (texture), and residual strain. Tilt-A-Whirl methodology has been employed for the evaluation of a W film showing both texture and residual strain. Sin2(ψ) analysis of the film was performed to quantify the strongly tensile in-plane strain (+0.476%) with an estimated in-plane tensile stress of ~1.9 GPa. The 3D dataset was also evaluated qualitatively via 3D visualization. Visualization of 3D texture/strain data poses challenges due to peak broadening resulting from defocusing of the beam at high ψ tilt angles. To address this issue, principal component analysis (PCA) was employed to diagnose, model, and remove the broadening component from the diffraction data. Evaluation of the raw data and subsequent corrected data (after removal of defocusing effects) has been performed through projection of the data into a virtual 3D environment (via CAD2VR software) to qualitatively detect the impact of residual strain on the observed pole figure.

Keywords

strain analysistungsten filmsTilt-A-Whirl methodology
Type
Proceedings Paper
Information
Powder Diffraction , Volume 37 , Issue 2 , June 2022 , pp. 52 - 61
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Copyright
Copyright © The Author(s), 2022. Published by Cambridge University Press on behalf of International Centre for Diffraction Data

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References

Abdelhameed, A. H., Angloher, G., Bauer, P., Bento, A., Bertoldo, E., Canonica, L., Fuchs, D., Hauff, D., Ferreiro Iachellini, N., Mancuso, M., Petricca, F., Probst, F., Riesch, J. and Rothe, J. (2020). “Deposition of tungsten thin films by magnetron sputtering for large-scale production of tungsten-based transition-edge sensors,” J. Low Temp. Phys. 199, 401–407.CrossRefGoogle Scholar
Cabrera, B., Clarke, R. M., Colling, P., Miller, A. J., Nam, S. and Romani, R. W. (1998). “Detection of single infrared, optical, and ultraviolet photons using superconducting transition edge sensors,” Appl. Phys. Lett 73, 735–737.CrossRefGoogle Scholar
Cullity, B. D. (1978). Elements of X-Ray Diffraction (Addison-Wesley, Reading, MA), 2nd ed., p. 75.Google Scholar
Gates-Rector, S., and Blanton, T. (2109). “The Powder Diffraction File: a quality materials characterization database,” Powder Diffr. 34, 352–360.CrossRefGoogle Scholar
Gottardi, L., and Nagayashi, K. (2021). “A review of X-ray microcalorimeters based on superconducting transition edge sensors for astrophysics and particle physics,” Appl. Sci. 11(3793), 1–44.CrossRefGoogle Scholar
Grünwald, E., Nuster, R., Treml, R., Kiener, D., Paltauf, G., and Brunner, R. (2015). “Young's modulus and Poisson's ratio characterization of tungsten thin films via laser ultrasound,” Mater. Today: Proc. 2, 4289–4294.Google Scholar
Hall, P. M. (1965). “Effect of stress on the superconducting transition temperature of thin films of tin,” J. Appl. Phys. 36, 2471–2475.CrossRefGoogle Scholar
Jach, T., Ritchie, N., Ullom, J., and Beall, J. A. (2007). “Quantitative analysis with the transition edge sensor microcalorimeter X-ray detector,” Powder Diffr. 22, 138–141.CrossRefGoogle Scholar
Lita, A. E., Rosenberg, D., Nam, S., Miller, A. J., Blazar, D., Kaatz, L. M., and Schwall, R. E. (2005). “Tuning of tungsten thin film superconducting transition temperature for fabrication of photon number resolving detectors,” IEEE Trans. Appl. Supercond. 15, 3528–3531.CrossRefGoogle Scholar
Lolli, L., Taralli, E., Portesi, C., Rajteri, M., and Monticone, E. (2016). “Aluminum–titanium bilayer for near-infrared transition edge sensors,” Sensors 16(953), 1–7.CrossRefGoogle ScholarPubMed
Rodriguez, M. A., Keenan, M. R., and Nagasubramanian, G. S. (2007). “In situ X-ray diffraction analysis of (CFx)n batteries: signal extraction by multivariate analysis,” J. Appl. Crystallogr. 40, 1097–1104.CrossRefGoogle Scholar
Rodriguez, M. A., Pearl, M. R., Van Benthem, M. H., Griego, J. J. M., and Pillars, J. R. (2013). “Tilt-A-Whirl: a texture analysis package for 3D rendering of pole figures using matlab,” Powder Diffr. 28, 81–89.CrossRefGoogle Scholar
Rodriguez, M. A., Harrison, K. L., Goriparti, S., Griego, J. J. M., Boyce, B. L., and Perdue, B. R. (2020). “Use of a Be-dome holder for texture and strain characterization of Li metal thin films via sin2(ψ) methodology,” Powder Diffr. 35, 89–97.CrossRefGoogle Scholar