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Least-squares refinement of biaxial stress components and unit-cell parameter in a 〈111〉 textured cubic TiN polycrystalline thin film by X-ray diffraction

Published online by Cambridge University Press:  29 February 2012

Ryouichi Yokoyama ,
Jimpei Harada  and
Yoshiaki Akiniwa
Ryouichi Yokoyama*
Affiliation:
Rigaku Corporation, 3-9-12 Akishima, Tokyo 196-8666, Japan
Jimpei Harada
Affiliation:
Rigaku Corporation, 3-9-12 Akishima, Tokyo 196-8666, Japan
Yoshiaki Akiniwa
Affiliation:
Department of Mechanical Engineering and Materials Science, Yokohama National University, 79-1 Tokiwadai, Hodogaya-ku, Yokohama 240-8501, Japan
*
a)Author to whom correspondence should be addressed. Electronic mail: [email protected]
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Abstract

Biaxial residual stress in a 〈111〉 textured cubic TiN polycrystalline thin film was analyzed by linear least-squares refinement using the method proposed by Yokoyama and Harada [J. Appl. Crystallogr. 42, 185–191 (2009)]. Values of the unstressed (or stress-free) unit-cell parameter a0=4.2332±0.0006 Å and the stress components of σ11=397(88), σ22=401(88), and σ12=−110(100) were obtained. The values of the in-plane stresses σ11 and σ22 presented in the TiN film are practically the same, while σ12 is relatively small. The results obtained in this study confirm that the above theoretical prediction by Yokoyama and Harada can be used to obtain reliable values of stress-free unit-cell parameter and three biaxial stress components of a textured cubic thin film.

Keywords

residual stresstexturestress-free unit-cell parameterleast-squares refinement
Type
Technical Articles
Information
Powder Diffraction , Volume 25 , Issue 1 , March 2010 , pp. 25 - 30
Copyright
Copyright © Cambridge University Press 2010

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