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D-91 Stress and Composition Evaluation for Gradient Nitride Coatings

Published online by Cambridge University Press:  20 May 2016

A. Ulyanenkov
Affiliation:
Bruker AXS GmbH, Karlsruhe, Germany
J. Brechbühl
Affiliation:
Bruker AXS GmbH, Karlsruhe, Germany
V. V. Uglov
Affiliation:
Belarussian State University, Minsk, Belarus
V. M. Anishchik
Affiliation:
Belarussian State University, Minsk, Belarus
S. V. Zlotski
Affiliation:
Belarussian State University, Minsk, Belarus
T. A. Alexeeva
Affiliation:
Belarussian State University, Minsk, Belarus
A. Lazar
Affiliation:
Institute of Solid State and Semiconductor Physics, Minsk, Belarus

Abstract

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Type
Denver X-Ray Conference
Copyright
Copyright © Cambridge University Press 2007

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