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D080 X-ray Diffraction Metrology Tool for Microstructure Control on 300mm Wafers for Silicon Based Semiconductors

Published online by Cambridge University Press:  20 May 2016

K. J. Kozaczek ,
P. R. Moran ,
D. S. Kurtz ,
R. I. Martin ,
L. Y. Huang  and
A. Stratilatov
K. J. Kozaczek
Affiliation:
HyperNex, Inc., State College, PA
P. R. Moran
Affiliation:
HyperNex, Inc., State College, PA
D. S. Kurtz
Affiliation:
HyperNex, Inc., State College, PA
R. I. Martin
Affiliation:
HyperNex, Inc., State College, PA
L. Y. Huang
Affiliation:
HyperNex, Inc., State College, PA
A. Stratilatov
Affiliation:
HyperNex, Inc., State College, PA
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Abstract

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Type
Denver X-Ray Conference
Information
Powder Diffraction , Volume 18 , Issue 2 , June 2003 , pp. 172
Copyright
Copyright © Cambridge University Press 2003

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