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Crystal structures and magnetic properties of Fe–N thin films deposited by dc magnetron sputtering

Published online by Cambridge University Press:  05 March 2012

Wei Tao Zheng ,
Xin Wang ,
Xianggui Kong ,
Hongwei Tian ,
Shansheng Yu ,
Zhudi Zhao  and
Xiaotian Li
Wei Tao Zheng*
Affiliation:
Department of Materials Science and Technology and Key Laboratory of Automobile Materials of MOE, Jilin University, Changchun 130023, China
Xin Wang
Affiliation:
Department of Materials Science and Technology and Key Laboratory of Automobile Materials of MOE, Jilin University, Changchun 130023, Chinaand Key Laboratory of Physics on Excited States Process, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Science, Changchun 130023, China
Xianggui Kong
Affiliation:
Key Laboratory of Physics on Excited States Process, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Science, Changchun 130023, China
Hongwei Tian
Affiliation:
Department of Materials Science and Technology and Key Laboratory of Automobile Materials of MOE, Jilin University, Changchun 130023, China
Shansheng Yu
Affiliation:
Department of Materials Science and Technology and Key Laboratory of Automobile Materials of MOE, Jilin University, Changchun 130023, China
Zhudi Zhao
Affiliation:
Department of Materials Science and Technology and Key Laboratory of Automobile Materials of MOE, Jilin University, Changchun 130023, China
Xiaotian Li
Affiliation:
Department of Materials Science and Technology and Key Laboratory of Automobile Materials of MOE, Jilin University, Changchun 130023, China
*
a)Electronic mail: [email protected]
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Abstract

Fe–N thin films were deposited on glass substrates by dc magnetron sputtering under various Ar∕N2 discharge conditions. Crystal structures and elemental compositions of the films were characterized by X-ray diffraction and X-ray photoelectron spectroscopy. Magnetic properties of the films were measured using a superconducting quantum interference device magnetometer. Films deposited at different N2∕(Ar+N2) flow ratios were found to have different crystal structures and different nitrogen contents. When the flow ratios were 60%, 50%, and 30%, a nonmagnetic single-phase FeN was formed in the films. At the flow ratio of 10%, two crystal phases of γ′-Fe4N and ε-Fe3N were detected. When the flow ratio reduced to 5%, a mixture of α-Fe, ε-Fe3N, FeN0.056, and α″-Fe16N2 phases was obtained. The value of saturation magnetization for the mixture was found to be larger than that of pure Fe.

Keywords

XRDXPSmagnetic properties
Type
Selected Papers from 2003 Chinese National Symposium on XRD
Information
Powder Diffraction , Volume 19 , Issue 4 , December 2004 , pp. 352 - 355
Copyright
Copyright © Cambridge University Press 2004

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