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A study of X-ray reflectivity data analysis methods for thin film thickness determination

Published online by Cambridge University Press:  10 January 2013

D. T. Brower ,
R. E. Revay  and
T. C. Huang
D. T. Brower
Affiliation:
Optex Communication Corporation, Rockville, Maryland 20850
R. E. Revay
Affiliation:
Optex Communication Corporation, Rockville, Maryland 20850
T. C. Huang
Affiliation:
IBM Research Division, Almaden Research Center, San Jose, California 95120
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Abstract

The determination of thin film thickness by four X-ray reflectivity methods (namely, the peak separation, the Fourier transform, the modified Bragg equation, and the curve-fitting methods) has been studied. An analysis of SrS and BaF2 thin films showed thickness values determined by the methods agreed to within 4%. The curve-fitting method had the highest accuracy but was time-consuming. The peak separation, the Fourier transform, and the modified Bragg equation methods are considerably faster and, on average, gave 2.8%, 0.9%, and 0.2% larger thicknesses than those of the curve-fitting method.

Type
Research Article
Information
Powder Diffraction , Volume 11 , Issue 2 , June 1996 , pp. 114 - 116
Copyright
Copyright © Cambridge University Press 1996

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