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Application of energy-dispersive diffraction to the analysis of highly inhomogeneous residual stress fields in thin film structures

Published online by Cambridge University Press:  06 March 2012

M. Klaus ,
W. Reimers  and
Ch. Genzel
M. Klaus
Affiliation:
Technische Universität Berlin, Ernst-Reuter-Platz 1, 10587 Berlin, Germany
W. Reimers
Affiliation:
Technische Universität Berlin, Ernst-Reuter-Platz 1, 10587 Berlin, Germany
Ch. Genzel
Affiliation:
Helmholtz-Zentrum Berlin für Materialien und Energie, Albert-Einstein-Straße 15, 12489 Berlin, Germany
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Abstract

For residual stress evaluation in complex substrate-coating systems, energy-dispersive (ED) diffraction with energies up to 100 keV can be applied to analyze the near interface residual stress state in the substrate, because the high energy white beam penetrates the coating completely. By the example of an Al2O3/TiCN on WC coating system we have studied the feasibility for using the coating reflections being stored in the ED diffraction patterns together with the substrate diffraction lines to analyze the residual stress state in individual sublayers of which the coating system consists. The results indicate that the ED method is suitable to detect even steep intralayer stress gradients, if the diffraction conditions are adapted to the coating geometry.

Keywords

residual stressenergy-dispersive diffractionthin films
Type
Applications Of Residual Stress Analysis
Information
Powder Diffraction , Volume 24 , Supplement S1 , June 2009 , pp. S82 - S86
Copyright
Copyright © Cambridge University Press 2009

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