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Anomalous peaks in grazing incidence thin film X-ray diffraction

Published online by Cambridge University Press:  10 January 2013

Richard A. Vaia ,
Maura S. Weathers  and
William A. Bassett
Richard A. Vaia
Affiliation:
Department of Materials Science and Engineering, Cornell University, Ithaca, New York 14853
Maura S. Weathers
Affiliation:
Materials Science Center X-Ray Facility, Cornell University, Ithaca, New York 14853
William A. Bassett
Affiliation:
Department of Geological Sciences, Cornell University, Ithaca, New York 14853
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Abstract

Numerous spurious X-ray peaks were encountered during grazing incidence angle diffractometer scans of ceramic and polymeric thin films on crystalline and amorphous substrate materials. At least three possible sources of spurious peaks are identified. (1) At (2θ) values greater than ∼ 10°, Laue reflections from characteristic and Bremsstrahlung continuum radiation produce spurious peaks with a (2θ) dependence on X-ray incident angle and sample orientation. At (2θ) values less than 10°, (2) specular X-ray reflection from a boundary between two media of different indices of refraction and (3) diffuse surface scattering produces spurious peaks with a dependence on X-ray incident angle and sample surface topography. From an understanding of the spurious peaks, improved experimental techniques may be developed. Because these peaks can interfere significantly with grazing incidence diffractometer scans, it is particularly important to those making studies of thin films by this asymmetric diffraction geometry to be aware of the existence and origins of these spurious peaks.

Keywords

grazing-incident X-raydiffractionanomalousspuriousspecular reflectiondiffuse surface scatteringLaue
Type
Research Article
Information
Powder Diffraction , Volume 9 , Issue 1 , March 1994 , pp. 44 - 49
Copyright
Copyright © Cambridge University Press 1994

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