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ZnO Based SAW Delay Line: Thin Film Characteristics and IDT Fabrication

Published online by Cambridge University Press:  01 February 2011

Farid Hassani ,
Shahrokh Ahmadi ,
Can E. Korman ,
Mona Zaghloul ,
Shiva Hullavarad ,
R.D. Vispute  and
T. Venkatesan
Farid Hassani
Affiliation:
Department of Electrical and Computer Engineering, The George Washington University, Washington, DC 20052
Shahrokh Ahmadi
Affiliation:
Department of Electrical and Computer Engineering, The George Washington University, Washington, DC 20052
Can E. Korman
Affiliation:
Department of Electrical and Computer Engineering, The George Washington University, Washington, DC 20052
Mona Zaghloul
Affiliation:
Department of Electrical and Computer Engineering, The George Washington University, Washington, DC 20052
Shiva Hullavarad
Affiliation:
Center for Superconductivity Research, Dept. of Physics, University of Maryland at College Park, College Park, MD 20742
R.D. Vispute
Affiliation:
Center for Superconductivity Research, Dept. of Physics, University of Maryland at College Park, College Park, MD 20742
T. Venkatesan
Affiliation:
Center for Superconductivity Research, Dept. of Physics, University of Maryland at College Park, College Park, MD 20742
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Abstract

ZnO, a well-known piezoelectric material, is used to develop micro-scale Surface Acoustic Wave (SAW) delay line sensor. In this work, SAW delay line Devices are fabricated employing ZnO films that are deposited by RF sputtering technique. Films are characterized prior to device fabrication by X-Ray Diffraction (XRD) for film crystalline quality, UV-visible transmission spectroscopy for optical characteristics, and Atomic Force Microscopy (AFM) for surface morphology. Interdigital electrodes producing surface acoustic waves in the hundreds of MHz are developed by photolithography and metalization techniques. SAW delay line device testing, measurement and characteristics on RF sputtered ZnO films are presented and compared.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 785: Symposium D – Materials and Devices for Smart Systems , 2003 , D4.4
Copyright
Copyright © Materials Research Society 2004

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References

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