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Y1Ba2Cu3O7‐x Films from Nitrate Solution using Rf Plasma Deposition

Published online by Cambridge University Press:  28 February 2011

A. Shah
Affiliation:
New York State Institute on Superconductivity, State University of New York at Buffalo, Bonner Hall, Buffalo, New York 14260
T. Haugan
Affiliation:
New York State Institute on Superconductivity, State University of New York at Buffalo, Bonner Hall, Buffalo, New York 14260
S. Witanachchi
Affiliation:
New York State Institute on Superconductivity, State University of New York at Buffalo, Bonner Hall, Buffalo, New York 14260
S. Patel
Affiliation:
New York State Institute on Superconductivity, State University of New York at Buffalo, Bonner Hall, Buffalo, New York 14260
D. T. Shaw
Affiliation:
New York State Institute on Superconductivity, State University of New York at Buffalo, Bonner Hall, Buffalo, New York 14260
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Abstract

A nitrate solution of Y, Ba and Cu was atomized and introduced into an inductively coupled argon ‐ oxygen plasma operated at 4.4 kW and 13.56 MHz under atmospheric pressure. As‐deposited superconducting films were grown on (100) YSZ substrates heated to 650°C. Critical temperatures of 85 K and critical current densities of 7.0 x 104 amp/cm2 at 77 K have been achieved. X‐ray diffraction shows the films to be oriented with the c‐axis perpendicular to the substrate surface. The effects of process parameters, solution composition, and aerosol concentration on the superconducting properties and microstructures will be discussed.

Type
Research Article
Copyright
Copyright © Materials Research Society 1990

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