No CrossRef data available.
Article contents
XRD analysis of TRAM composed from [Sb2Te3/GeTe] superlattice film and its switching characteristics
Published online by Cambridge University Press: 24 February 2015
Abstract
We studied GeTe structures in topological switching random access memories (TRAMs) with a [GeTe/Sb2Te3] superlattice by using X-ray diffraction (XRD) analysis. We examined the electrical characteristics of the TRAMs deposited at different temperatures. We found that XRD spectra differed between the films deposited at 200 and 240°C and that the differences corresponded to the differences in the GeTe sequences in the films.
- Type
- Articles
- Information
- Copyright
- Copyright © Materials Research Society 2015