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X-Ray Diffraction Study of Clusters in a-tC Films

Published online by Cambridge University Press:  28 February 2011

L. J. Martínez-Miranda ,
T. A. Friedmann ,
J. P. Sullivan ,
M. P. Siegal ,
T. W. Mercer ,
N. J. DiNardo  and
F. Fang
L. J. Martínez-Miranda
Affiliation:
Kent State University, Dept. of Physics, Kent, OH 44242, and University of Maryland, Dept. of Materials and Nuclear Engineering, College Park, MD 20742
T. A. Friedmann
Affiliation:
Sandia National Laboratories, Albuquerque, NM 87185
J. P. Sullivan
Affiliation:
Sandia National Laboratories, Albuquerque, NM 87185
M. P. Siegal
Affiliation:
Sandia National Laboratories, Albuquerque, NM 87185
T. W. Mercer
Affiliation:
Drexel University, Dept. of Physics, Philadelphia, PA 19104
N. J. DiNardo
Affiliation:
University of Pennsylvania, Dept. of Materials Science and Engineering, Philadelphia, PA 19104
F. Fang
Affiliation:
University of Pennsylvania, Dept. of Electrical Engineering, Philadelphia, PA 19104
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Abstract

We performed an X-ray diffraction study of amorphous-tetrahedrally-coordinated carbon (a-tC) films prepared by pulsed laser deposition (PLD). The samples' properties were analyzed as a function of laser energy and thickness. For all thicknesses and laser energies, films were made up of clusters with a basic unit size of 7 -11 nm. Thicker films, as well as films prepared at higher laser densities exhibit larger clusters, in the tens of nanometers. The clusters are not readily observable by AFM, which may indicate the presence of a flat (graphitized) top film surface.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 358: Symposium F – Microcrystalline and Nanocrystalline Semiconductors , 1994 , 857
Copyright
Copyright © Materials Research Society 1995

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References

REFERENCES

1 Siegal, M. P. et al. , MRS Spring Meeting, 1994; T. A. Friedmann et al., MRS Spring Meeting, 1994.Google Scholar
2 Cuomo, J. J. et al. , J. Vac. Sci. Technol., A 10, 3414 (1992); F. Li and J. S. Cannin, Phys. Rev. Lett., 65, 1905 (1990).Google Scholar
3 Glatter, O. and Kratky, O., eds., Small Angle X-Ray Scattering: London, Academic Press, 1982.Google Scholar
4 Itri, R. and Amaral, L. Q., J. Phys. Chem. 95, 423 (1991).Google Scholar
5 Marignan, J., Basserau, P. and Delord, P., J. Phys. Chem. 90, 645 (1986).Google Scholar
6 Glatter, O., J. Appl. Cryst. 13, 577 (1980).Google Scholar
7 André, J. P., Patillon, J. N., Schiller, C., Lesiourd, J. Y., Vlaeminck, O. and Malhouroux, N., J. Cryst. Growth 109, 292 (1991).Google Scholar
8 Bawendi, M. G., Kortan, A. R., Steigerwald, M. L. and Brus, L. E., J. Chem. Phys. 91, 7282 (1989).Google Scholar
9 Ken-ichi, Ohshima, Yatsuya, Shigeki and Harada, Jimpei, J. Phys. Soc. Jap. 50, 3071 (1981).Google Scholar
10 Martínez-Miranda, L. J., Chow, G. M. and Edelstein, A. S., to appear in Phys. Rev. B15.Google Scholar
11 LeGrand, D. G., "Small Angle X-ray Scattering and Neutron Scattering", Metals Handbook,, Vol. 10: Materials Characterization, Amer. Soc. for Metals, Metals Park, OH, 1986; page 402, and references therein.Google Scholar
12 Mercer, T. W., et al. , MRS Fall meeting, 1994.Google Scholar
13 Drabold, D. A., et al. , Phys. Rev: B1, 49, 16 415 (1994).Google Scholar