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X-Ray Diffraction (Pole Figure) Study of the Epitaxy of Gold Thin Films on GaAs

Published online by Cambridge University Press:  15 February 2011

Siu Leung ,
A. G. Milnes  and
D. D. L. Chung
Siu Leung
Affiliation:
Department of Electrical Engineering, Center for the Joining of Materials, Carnegie-Mellon University, Pittsburgh, PA 15213, (U.S.A.)
A. G. Milnes
Affiliation:
Department of Electrical Engineering, Center for the Joining of Materials, Carnegie-Mellon University, Pittsburgh, PA 15213, (U.S.A.)
D. D. L. Chung
Affiliation:
Department of Metallurgical Engineering and Materials Science, Center for the Joining of Materials, Carnezie-Mellon University, Pittsburgh, PA 15213, (U.S.A.)
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Abstract

X-ray diffraction (pole figure) measurements were made on gold thin films (300–2300 Å) evaporated on GaAs{111} and GaAs{001} to investigate the heteroepitaxy and twinning of the gold films and the chemoepitaxy of Au7Ga2 on GaAs. For both GaAs orientations the epitaxial relationship (hkl)AU[hkl]Au/ (hkl)GaAs[hkl]GaAs was observed for all values of h, k and l. In addition, twin orientations were observed. For GaAs{111}, fourfold rotation twinning about the Au[l11] direction resulted in four azimuthal orientations: [112]Au // [112]GaAs, [112]Au// [112]GaAs, [112]Au// [110]GaAs, and [112]AU/ [110]GaAs. For GaAs{001}, reflection twinning with the four Au{111} planes as twinning planes resulted in four other orientations with Au(001) at approximately 71° from GaAs(001). The relative amounts of the twins depended on the substrate temperature, the film thickness and the deposition rate. Chemoepitaxy was observed for Au7Ga2 on GaAs{111} the epitaxial relationship was (111)Au/ (0110)Au7Ga2/(111)GaAsand Au7Ga2[0001] was off by 10° from GaAs[110], toward GaAs[011], i.e. Au7Ga2[0001] was off by 10° from Au[110], toward Au[011]. This relationship corresponds to a perfect lattice match between Au7Ga2 and gold.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 18: Symposium C – Interfaces and Contacts , 1982 , 109
Copyright
Copyright © Materials Research Society 1982

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References

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