Article contents
X-Ray Diffraction Determination of Interface Roughness in GaAs/AlxGa1-xAs Multilayers
Published online by Cambridge University Press: 15 February 2011
Abstract
X-ray diffraction has been used to quantify the interface roughness of GaAs/AlxGa1-xAs multilayers. X-ray measurements, both θ-2θ and rocking-curve analyses, quantitatively determine the correlated and random components of the interface roughness as well as the correlation length of the roughness along the interface. The multilayer structures of GaAs/Al0.3Ga0.7As and GaAs/AlAs differ substantially in the amplitude and correlation length of the interface roughness. The change in interfacial roughness is compared to that determined from low temperature photoluminescence (PL) measurements, the conventional measure of interface uniformity.
- Type
- Research Article
- Information
- Copyright
- Copyright © Materials Research Society 1993
References
- 2
- Cited by