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X-ray Analysis of Strain Relaxed Domain Structure in (100)/(001)-oriented epitaxial PbTiO3 thick films grown on (100)SrTiO3 substrates

Published online by Cambridge University Press:  01 February 2011

Hiroshi Funakubo ,
Yong Kwan Kim ,
Shintaro Yokoyama ,
Rikyu Ikariyama ,
Hiroshi Funakubo ,
S. K. Streiffer ,
Ken Nishida  and
Keisuke Saito
Hiroshi Funakubo
Affiliation:
[email protected], Tokyo Institute of Technology, Department of Innovative and Engineered Material, 4259 Nagatsuta-cho, Midori-ku, Yokohama, 226-8503, Japan, +81-45-924-5398, +81-45-924-5398
Yong Kwan Kim
Affiliation:
[email protected], Tokyo Institute of Technology, Department of Innovative and Engineered Material, Yokohama, 226-8503, Japan
Shintaro Yokoyama
Affiliation:
[email protected], Tokyo Institute of Technology, Department of Innovative and Engineered Material, Yokohama, 226-8503, Japan
Rikyu Ikariyama
Affiliation:
[email protected], Tokyo Institute of Technology, Department of Innovative and Engineered Material, Yokohama, 226-8503, Japan
Hiroshi Funakubo
Affiliation:
[email protected], Tokyo Institute of Technology, Department of Innovative and Engineered Material, Yokohama, 226-8503, Japan
S. K. Streiffer
Affiliation:
[email protected], Argonne National Laboratory, Center for Nanoscale Materials, Argonne, IL, 60439, United States
Ken Nishida
Affiliation:
[email protected], National Defence Academy, Department of Electric Engineering, Yokohama, 239, Japan
Keisuke Saito
Affiliation:
[email protected], Bruker AXS, Application Laboratory, Yokohama, 221-0022, Japan
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Abstract

Crystal structure of epitaxially grown (100)/(100)-oriented PbTiO3 films on (100)SrTiO3 substrates with 3.8 μm in thickness was investigated by the XRD reciprocal space mapping techniques. The observed poles of PbTiO3 004, 400, 204, 402 and 420 scans can be successfully explained using the model consisting with the one type of (001) domain and three types of (100) domains in good agreement with the estimation from the scanning probe microscopy in conjunction with the in-plane and out-of plain XRD analysis.

Keywords

microelectro-mechanical (MEMS)organometallicferroelectric
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 1034 , 2007 , 1034-K10-35
Copyright
Copyright © Materials Research Society 2008

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