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Wear Resistant Amorphous PVD B-N-C Films for Tribological Applications

Published online by Cambridge University Press:  10 February 2011

O. Knotek ,
E. Lugscheider ,
C. Barimani  and
C. W. Siry
O. Knotek
Affiliation:
RWTH Aachen University of Technology, Materials Science Institute, Templergraben 55 52056 Aachen, Germany
E. Lugscheider
Affiliation:
RWTH Aachen University of Technology, Materials Science Institute, Templergraben 55 52056 Aachen, Germany
C. Barimani
Affiliation:
RWTH Aachen University of Technology, Materials Science Institute, Templergraben 55 52056 Aachen, Germany
C. W. Siry
Affiliation:
RWTH Aachen University of Technology, Materials Science Institute, Templergraben 55 52056 Aachen, Germany
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Abstract

Amorphous B-N-C films with a variety of properties were deposited by PVD-magnetronsputter-ion-plating. Compared to nonconductive reactive r.f. BN-targets the semiconductive behaviour of specially produced B4C-targets permitted a d.c. reactive or non-reactive mode of deposition. These films are characterized by high hardness with decreased coefficient of friction. A tribological evaluation by modified pin-on-disk outline the wear protection effects in tribosystems with metal counter part. This work was partially financed by the Commission of the European Community under Brite/EuRam contract BRE2-CT93-0451.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 441: Thin Films – Structure and Morphology , 1996 , 679
Copyright
Copyright © Materials Research Society 1997

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