Hostname: page-component-586b7cd67f-t8hqh Total loading time: 0 Render date: 2024-11-25T17:49:39.296Z Has data issue: false hasContentIssue false
  • English
  • Français

UV Raman Studies of Microcrystalline Diamond

Published online by Cambridge University Press:  10 February 2011

Katsuyuk Okada ,
Hisao Kanda ,
Shojiro Komatsu  and
Seiichiro Matsumoto
Katsuyuk Okada
Affiliation:
National Institute for Research in Inorganic Materials, 1-1 Namiki, Tsukuba, Ibaraki 305-0044, Japan, [email protected]
Hisao Kanda
Affiliation:
National Institute for Research in Inorganic Materials, 1-1 Namiki, Tsukuba, Ibaraki 305-0044, Japan, [email protected]
Shojiro Komatsu
Affiliation:
National Institute for Research in Inorganic Materials, 1-1 Namiki, Tsukuba, Ibaraki 305-0044, Japan, [email protected]
Seiichiro Matsumoto
Affiliation:
National Institute for Research in Inorganic Materials, 1-1 Namiki, Tsukuba, Ibaraki 305-0044, Japan, [email protected]
Get access

Abstract

Microcrystalline diamond films have been prepared in a 13.56 MHz low pressure inductively coupled plasma, in which the pressure of CH4/H2and CH4/CO/H2 plasmas was varied from 45 to 50 mTorr. The bonded structures of the obtained deposits were studied by Raman spectroscopy with 514, 325, and 244 nm excitation wavelength. 514 nm excited Raman spectra exhibit two peaks at ∼1355 cm−1 and ∼1580 cm−1 corresponding to sp2 bonding without CO additive (CH4/H2, plasma). New peaks at ∼1150 cm−1 assigned to sp3-bonded carbon network and at ∼1480 cm−1 appear with CO additive (CH4/CO/H2, plasma). 325 nm excited Raman spectra show a shoulder at ∼1150 cm−1, a clear 1332 cm−1 diamond peak, and the peak at ∼1580 cm−1 is remarkably enhanced. In 244 nm excited Raman scattering, the 1332 cm−1 diamond peak is only enhanced whereas the peak at ∼1580 cm−1 is correspondingly diminished. These features of the Raman spectra imply that the vibrational modes of sp2 sites are resonantly enhanced with 514 nm excitation because the 514 nm (2.4 eV) corresponds to the π-π* transition in sp2-bonded carbon, while the 325 nm (3.8 eV) and 244 nm (5.1 eV) excitations are possibly sufficient to excite the σ state of both sp2- and sp3-bonded carbon

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 593: Symposium U – Amorphous & Nanostructured Carbon , 1999 , 459
Copyright
Copyright © Materials Research Society 2000

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

1. Robertson, J., Prog. Solid State Chem. 21, 199 (1991).Google Scholar
2. Covalently Bonded Disordered Thin-Film Materials, edited by Siegal, MP.,Milne, W.I., and Jaskie, J.E., Mater. Res. Soc. Symp. Proc. 498, Pittsburgh, PA(1998).Google Scholar
3. Gilkes, K.W.R., Sands, H.S., Batchelder, D.N., Robertson, J., and Milne, W.I., Appl. Phys. Lett. 70, 1980(1997).Google Scholar
4. Merkulov, V.I., Lannin, J.S., Murno, C.H., Asher, S.A., Veerasamy, U.S., and Milne, W.I., Phys. Rev. Lett. 78, 4869(1997).Google Scholar
5. Solin, S. A. and Ramdas, A. K., Phys. Rev. B 1 1687 (1970).Google Scholar
6. Nemanich, R. J., Glass, J. T., Lucovsky, G., and Shroder, R. E., J. Vac. Sci. Technol. A 6 1783 (1988).Google Scholar
7. Wagner, J., Ramsteiner, M., Wild, Ch., and Koidl, P., Phys. Rev. B 40 1817 (1989).Google Scholar
8. Shroder, R. E. and Nemanich, R. J., Phys. Rev. B 41 3738 (1990).Google Scholar
9. Tuinstra, F. and Koenig, J. L., J. Chem. Phys. 53 1126 (1970).Google Scholar
10. Yoshikawa, M., Katagiri, G., Ishida, H., Ishitani, A., and Akamatsu, T., Appl. Phys. Lett. 52 1639 (1988).; J. Appl. Phys. 64 6464 (1988).Google Scholar
11. Yoshikawa, M., Nagai, N., Matsuki, M., Fukuda, H., Katagiri, G., Ishida, H., and Ishitani, A., Phys. Rev. B 46 7169 (1992).Google Scholar
12. Tallant, D. R., Friedmann, T. A., Missert, N. A., Siegal, M. P., and Sullivan, J. P., Mater. Res. Soc. Symp. Proc. 498 37 (1998).Google Scholar
13. Okada, K., Komatsu, S., Ishigaki, T., and Matsumoto, S., Mater. Res. Soc. Symp. Proc. 363 157 (1995).Google Scholar
14. Okada, K., Komatsu, S., and Matsumoto, S., J. Mater. Res. 14 578 (1999).Google Scholar
15. Okada, K., Aizawa, T., Souda, R., Komatsu, S., and Matsumoto, S., (unpublished).Google Scholar
16. Wang, C. Z. and Ho, K. M., Phys. Rev. Lett. 71 1184 (1993).Google Scholar
17. Drabold, D. A., Fedders, P. A., and Stumm, P., Phys. Rev. B 49 16415 (1994).Google Scholar