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Uv Excimer Laser-Induced Deposition of Palladium from Palladium Acetate Films

Published online by Cambridge University Press:  21 February 2011

Hilmar Esrom  and
Georg Wahl
Hilmar Esrom
Affiliation:
Asea Brown Boveri, Corporate Research, D-6900 Heidelberg, FRG
Georg Wahl
Affiliation:
Asea Brown Boveri, Corporate Research, D-6900 Heidelberg, FRG
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Abstract

UV excimer laser-induced deposition of palladium from spin coated palladium acetate films in air is described. We have investigated mainly the deposition of palladium on aluminum oxide and quartz substrates and its dependence on the fluence and the number of excimer laser pulses. The decomposition mechanism was studied by measuring in situ the transmitted pulse energy during the exposure process. We have found that the excimer laser-induced decomposition of palladium acetate films is mainly pyrolytic and a simple model can be used to describe the decomposition process.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 158: Symposium B – In-Situ Patterning: Selective Area Deposition and Etching , 1989 , 109
Copyright
Copyright © Materials Research Society 1990

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References

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